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Code of Federal Regulations
Title 40 - PROTECTION OF ENVIRONMENTChapter I - ENVIRONMENTAL PROTECTION AGENCYSubchapter C - AIR PROGRAMSPart 98 - MANDATORY GREENHOUSE GAS REPORTING
Subpart I - ELECTRONICS MANUFACTURING
Appendix Table I-8 to Subpart I of Part 98 - Default Emission Factors (1-U[N2O,j]) for N[2]O Utilization (U[N2O,j])

40 C.F.R. § 98 app Table I-8 to Subpart I of Part 98

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Appendix Table I-8 to Subpart I of Part 98 - Default Emission Factors (1-U[N2O,j]) for N[2]O Utilization (U[N2O,j])

Process type factorsN2O
CVD 1-Ui0.8
Other Manufacturing Process 1-Ui1.0

40C.F.R. 98 app Table I-8 to Subpart I of Part 98