40 C.F.R. § 98 app Table I-11 to Subpart I of Part 98Download PDFCurrent through May 31, 2024Appendix Table I-11 to Subpart I of Part 98 - Default Emission Factors (1-U[ij]) for Gas Utilization Rates (U[ij]) and By-Product Formation Rates (B[ijk]) for Semiconductor Manufacturing for Use With the Stack Test Method (150 mm and 200 mm Wafers)View Image 40 C.F.R. 98 app Table I-11 to Subpart I of Part 98 78 FR 68229, Nov. 13, 2013