40 C.F.R. § 98 app Table I-1 to Subpart I of Part 98
Current through May 31, 2024
| Product type | Emission factors EFi | |||||
| CF4 | C2F6 | CHF3 | C3F8 | NF3 | SF6 | |
| Semiconductors (kg/m2) | 0.90 | 1.00 | 0.04 | 0.05 | 0.04 | 0.20 |
| LCD (g/m2) | 0.50 | NA | NA | NA | 0.90 | 4.00 |
| MEMS (kg/m2) | NA | NA | NA | NA | NA | 1.02 |
NOTES: NA denotes not applicable based on currently available information.
40 C.F.R. 98 app Table I-1 to Subpart I of Part 98