"Continuous gas detection system."
"Emergency control station."
"Fabrication area."
"Hazardous production material (HPM)."
"HPM room."
"Pass-through."
"Semiconductor fabrication facility."
"Service corridor."
"Tool."
"Workstation."
Exception: Class I, Division 2 hazardous electrical equipment is not required when the air removal from the workstation or dilution will prevent the accumulation of flammable vapors and fumes on a continuous basis.
Exceptions:
Exceptions:
Exception: Gas cabinets located in an HPM room other than those cabinets containing pyrophoric gases.
Exceptions:
Exception: A continuous gas detection system is not required for occasional transverse crossings of the corridors by supply piping that is enclosed in a ferrous pipe or tube for the width of the corridor.
Exception: Where the gas-detection sampling point initiating the gas detection system alarm is at the use location or within a gas valve enclosure of a branch line downstream of a piping distribution manifold, the shutoff valve for the branch line located in the piping distribution manifold enclosure shall automatically close.
Exception: Fabrication areas containing quantities of hazardous materials not exceeding the maximum allowable quantities per control area established by paragraph (C)(1)(a)(5003.1.1) of rule 1301:7-7-50 and paragraphs (D)(3)(d)(5704.3.4) and (D)(3)(e)(5704.3.5) of rule 1301:7-7-57 of the Administrative Code.
Table 2704.2.2.1
Quantity limits for hazardous materials in a single fabrication area in Group H-5a
Hazard category | Solids (pounds/square foot) | Liquids (gallons/square foot) | Gas (cubic foot @ NTP/square foot) |
Physical-hazard materials | |||
Combustible dust | Note b | Not applicable | Not applicable |
Combustible fiber Loose Baled | Note b Notes b and c | Not applicable | Not applicable |
Combustible liquid Class II Class IIIA Class IIIB Combination Class I, II and IIIA | Not applicable | 0.01 0.02 Not limited 0.04 | Not applicable |
Cryogenic gas Flammable Oxidizing | Not applicable | Not applicable | Note d 1.25 |
Explosives | Note b | Note b | Note b |
Flammable gas Gaseous Liquefied | Not applicable | Not applicable | Note d Note d |
Flammable liquid Class IA Class IB Class IC Combination Class IA, IB and IC Combination Class I, II and IIIA | Not applicable | 0.0025 0.025 0.025 0.025 0.04 | Not applicable |
Flammable solid | 0.001 | Not applicable | Not applicable |
Organic peroxide Unclassified detonable Class I Class II Class III Class IV Class V | Note b Note b 0.025 0.1 Not limited Not limited | Not applicable | Not applicable |
Oxidizing gas Gaseous Liquefied Combination of gaseous and liquefied | Not applicable | Not applicable | 1.25 1.25 1.25 |
Oxidizer Class 4 Class 3 Class 2 Class 1 Combination oxidizer class 1, 2, 3 | Note b 0.003 0.003 0.003 0.003 | Note b 0.03 0.03 0.03 0.03 | Not applicable |
Pyrophoric | 0.01 | 0.00125 | Notes d and e |
Unstable reactive Class 4 Class 3 Class 2 Class 1 | Note b 0.025 0.1 Not limited | Note b 0.0025 0.01 Not limited | Note b Note b Note b Not limited |
Water reactive Class 3 Class 2 Class 1 | Note b 0.25 Not limited | 0.00125 0.025 Not limited | Not applicable |
Health-hazard materials | |||
Corrosives | Not limited | Not limited | Not limited |
Highly toxics | Not limited | Not limited | Note d |
Toxics | Not limited | Not limited | Note d |
For SI: 1 pound per square foot = 4.882 kg/m2, 1 gallon per square foot = 40.7 L/m2, 1 cubic foot @ NTP/square foot = 0.305 m3@ NTP/m2, 1 cubic foot = 0.02832 m3.
Table 2705.2.2
Maximum quantities of HPM at a workstationd
HPM classification | State | Maximum quantity |
Flammable, highly toxic, pyrophoric and toxic combined | Gas | Combined aggregate volume of all cylinders at a workstation shall not exceed an internal cylinder volume of 39.6 gallons or 5.29 cubic feet |
Flammable | Liquid Solid | 15 gallonsa,b 5 poundsa,b |
Corrosive | Gas Liquid Solid | Combined aggregate volume of all cylinders at a workstation shall not exceed an internal cylinder volume of 39.6 gallons or 5.29 cubic feet Use-Open System: 25 gallonsb Use-Closed System: 150 gallonsb,e 20 poundsa,b |
Highly toxic | Liquid Solid | 15 gallonsa 5 poundsa |
Oxidizer | Gas Liquid Solid | Combined aggregate volume of all cylinders at a workstation shall not exceed an internal cylinder volume of 39.6 gallons or 5.29 cubic feet Use-open system:12 gallonsb Use-closed system: 60 gallonsb 20 poundsa,b |
Pyrophoric | Liquid Solid | 0.5 gallonc,f 4.4 poundsc,f |
Toxic | Liquid Solid | Use-open system: 15 gallonsb Use-closed system: 60 gallonsb 5 poundsa,b |
Unstable reactive Class 3 | Liquid Solid | 0.5 gallona,b 5 poundsa,b |
Water reactive Class 3 | Liquid Solid | 0.5 gallonc,f See Table 2704.2.2.1 of this rule |
For SI: 1 pound = 0.454 kg, 1 gallon = 3.785 L.
Replaces: 1301:7-7-27
Ohio Admin. Code 1301:7-7-27
Five Year Review (FYR) Dates: 12/15/2022
Promulgated Under: 119.03
Statutory Authority: 3737.83, 3737.82, 3737.22
Rule Amplifies: 3737.22, 3737.83, 3737.82
Prior Effective Dates: 07/01/1979, 06/01/1985, 06/15/1992, 07/01/1993, 09/01/1995, 03/30/1998, 01/03/2000, 09/01/2005, 07/01/2007, 11/01/2011, 12/15/2017