Code of Federal Regulations, title 40, part 63, subpart BBBBB, as amended, entitled "National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing," is incorporated by reference.
Minn. R. agency 167, ch. 7011, EMISSION STANDARDS FOR HAZARDOUS AIR POLLUTANTS, pt. 7011.7960
Statutory Authority: MS s 116.07