SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCDownload PDFPatent Trials and Appeals BoardDec 10, 20202019006958 (P.T.A.B. Dec. 10, 2020) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 15/395,181 12/30/2016 Darrell TRUHITTE ONS01731C01US 6251 132194 7590 12/10/2020 SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC (AS) 5005 E. McDowell Road Maildrop A700 Phoenix, AZ 85008 EXAMINER KEBEDE, BROOK ART UNIT PAPER NUMBER 2894 NOTIFICATION DATE DELIVERY MODE 12/10/2020 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): ipdocket@iptech.law patents@onsemi.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE ____________ BEFORE THE PATENT TRIAL AND APPEAL BOARD ____________ Ex parte DARRELL TRUHITTE Appeal 2019-006958 Application 15/395,181 Technology Center 2800 ____________ Before ROMULO H. DELMENDO, MICHAEL P. COLAIANNI, and MICHAEL G. McMANUS, Administrative Patent Judges. COLAIANNI, Administrative Patent Judge. DECISION ON APPEAL Pursuant to 35 U.S.C. § 134(a), Appellant1 appeals from the Examiner’s decision to reject claims 6–15. We have jurisdiction under 35 U.S.C. § 6(b). We AFFIRM. 1 We use the word “Appellant” to refer to “applicant” as defined in 37 C.F.R. § 1.42. Appellant identifies the real party in interest as Semiconductor Components Industries LLC. Appeal Br. 3. Appeal 2019-006958 Application 15/395,181 2 Appellant’s invention is directed to a method of forming a plurality of semiconductor packages that includes coating an etch mask on an array of unsingulated semiconductor packages and plasma etching a plurality of singulation lines in the array through the slits formed by the coated etch mask (Claim 6). The use of plasma etching to singulate the semiconductor packages is said to reduce the cost of molded array packages (MAP) (Spec. ¶ 52). Claim 6 is representative of the subject matter on appeal: 6. A method of forming a plurality of semiconductor packages, comprising: providing an array of unsingulated semiconductor packages coupled with one of a lead frame and a substrate and at least partially encapsulated in an encapsulant; coating an etch mask on the array, the etch mask having a plurality of slits therein, and; plasma etching a plurality of singulation lines in the array through the plurality of slits, thereby singulating the array to form a plurality of singulated semiconductor packages. Appellant appeals the following rejection: Claims 6–15 are rejected on the ground of nonstatutory double patenting as unpatentable over claims 1–20 of U.S. Patent 9,559,007 B1 to Truhitte in view of Barton (US 6,465,344 Bl issued Oct. 15, 2002) and Choi (US 2015/0079281 Al published Mar. 19, 2015). Appellant argues the subject matter of independent claim 6 only (Appeal Br. 8–13). Claims 7 to 15 will stand or fall with our analysis of the rejection of claim 6. Appeal 2019-006958 Application 15/395,181 3 FINDINGS OF FACT & ANALYSIS The Examiner’s findings and conclusions regarding the nonstatutory double patenting rejection are located on pages 3 to 7 of the Final Office Action. Choi is cited to teach the spin coating method recited in dependent claim 10. Appellant does not specifically contest Choi’s teachings or the Examiner’s rejection based thereon (Appeal Br. generally). Accordingly, we focus on the combination of Truhitte’s claims, as interpreted in light of Truhitte’s disclosure, and Barton in this decision. Appellant argues that “coupling” in Truhitte’s claim 6 differs from “coating” in the application’s claim 6 (Appeal Br. 11). Appellant contends the process of coupling differs from the process of coating (Appeal Br. 11). Appellant argues that Truhitte’s coupling in claim 6 involves a separate preexisting piece from an array which has the slits in it (Appeal Br. 12). Appellant argues that coating in application claim 6 indicates that the etch mask is actually formed on the array itself and never existed structurally separate and apart from the structure of the array prior to the completion of the coating step (Appeal Br. 12). Appellant contends that the etch mask formed by coating cannot be coupled with the array as the mask does not exist until the coating step is finished (Appeal Br. 12). Appellant argues that Truhitte describes the coupling embodiment separately from the coating embodiment (Appeal Br. 12). Appellant argues that Truhitte describes that coupling embodiment as having a different structure than the coating embodiment (Appeal Br. 12). Appellant contends that Truhitte’s coupling embodiment uses rigid, preformed masks that are mechanically coupled to the fixture (Appeal Br. 12). Appellant contends that in contrast Truhitte’s coating embodiment includes a disclosure that the coated masks and Appeal 2019-006958 Application 15/395,181 4 physically separate etch masks are different, non-identical versions of etch masks that could be used in combination with each other (Appeal Br. 13). Appellant contends that a coupled mask cannot do all the things a coated mask could do, and vice versa (Appeal Br. 13). Appellant contends that the coating method would not have been an obvious variant of Truhitte’s coupled method (Appeal Br. 13). Appellant’s arguments are directed to the construction of Truhitte’s claim 6. We now construe that claim. In construing a patented claim in a double patenting rejection, we are to review the portions of the patent that are related to the specific claim. In re Vogel, 422 F.2d 438, 441–42 (CCPA 1970). The Examiner finds that Truhitte’s claim 6 is identical to the present application’s claim 6, except that Truhitte’ claim 6 recites a coupling step, whereas the application claim 6 recites a coating step (Final Act. 3–4). Truhitte’s claim 6 recites, in relevant part, “coupling an etch mask with the array, the etch mask having a plurality of slits therein.” Truhitte describes coupling a first etch mask and second etch mask to the fixture (col. 2, ll. 25– 26; col. 4, ll. 56–57; col. 5, ll. 19–-28). Truhitte discloses the etch mask may be made by coating (col. 7, ll. 49–52). Truhitte discloses that the etch mask made by coating may be used in lieu of or in combination with the etching fixture with one or more etch masks (col. 7, ll. 53–55, 58–61). Truhitte may exemplify that preformed etching masks are coupled to the fixture and coating masks are applied above one or more the packages. Id. However, Truhitte does not define coupling an etch mask as excluding coating to achieve the desired coupling. Coupling is defined by Merriam-Webster’s Dictionary as “the act of bringing or coming together.” (Ans. 14 (emphasis omitted)). Stated differently, Truhitte uses an etch mask in claim 6 Appeal 2019-006958 Application 15/395,181 5 regardless of how the etch mask is brought together (i.e., coupled) with the array. Appellant contends that a coated etch mask is not coupled until the coating method is finished (Appeal Br. 12). Even if we accept Appellant’s premise that a coated etch mask is not coupled until the process of coating the etch mask is finished, that does not change the fact that the coated etch mask is coupled to the array. The process claimed in Truhitte’s patent requires coupling an etch mask. No time requirement is present in the claim that would exclude a coating process that couples the etch mask to the array. We are unpersuaded by Appellant’s arguments. We construe Truhitte’s claim 6 as requiring an etch mask that is brought together with the array. With this claim construction in mind, we determine that the Examiner correctly finds that coupling in claim 6 is broader than coating and may reasonably include coating to cause the coupling of the etch mask with the array (Ans. 14). The Examiner further determines that Barton’s teaching would have suggested coating a mask as an etch mask in Truhitte’s method of claim 6 (Final Act. 6–7). Appellant argues that Barton applies a coated mask to wet etch partially a semiconductor wafer, but does not use plasma etching to singulate semiconductor packages (Appeal Br. 9). Appellant argues that Barton uses the coating as a protective film during wet etching but Barton does not disclose plasma etching a plurality of singulation lines in array through a plurality of slits in the mask (Appeal Br. 10). Appellant argues that Barton would not have rendered obvious using a coated etch mask as the sole mechanism to singulate a die (Appeal Br. 9–10). Appeal 2019-006958 Application 15/395,181 6 Appellant’s arguments are not persuasive because they attack Barton alone, without addressing the combined teachings of Truhitte and Barton. In particular, the Examiner correctly finds the teaching to singulate a semiconductor package using a plasma is recited in Truhitte’s claim 6 (Ans. 12–13). Barton is relied upon to teach that the step of coupling an etch mask may include coating an etch mask on Truhitte’s semiconductor package array. Appellant cites to Ex parte Ouk, Appeal No. 2017-009447 (PTAB Sept. 25, 2018) to support their argument that the application claims are not obvious over the Truhitte patent claims (Appeal Br. 11). That decision is not precedential and we are not bound by its holdings. In any event, Appellant distinguishes the facts in Ouk from the present facts (Appeal Br. 11). The holding in Ouk has no bearing on our decision in this appeal. On this record, we affirm the Examiner’s non-statutory double patent rejection of claims 6–15 over Truhitte in view of Barton and Choi. CONCLUSION In summary: Claims Rejected Basis Prior Art Affirmed Reversed 6–15 Non- statutory double patenting Truhitte, Barton, Choi 6–15 No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(1)(iv). AFFIRMED Copy with citationCopy as parenthetical citation