SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCDownload PDFPatent Trials and Appeals BoardMay 21, 20212020003987 (P.T.A.B. May. 21, 2021) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 15/679,666 08/17/2017 Sw WANG ONS02434US 9741 132194 7590 05/21/2021 SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC (AS) 5005 E. McDowell Road Maildrop A700 Phoenix, AZ 85008 EXAMINER GUMEDZOE, PENIEL M ART UNIT PAPER NUMBER 2899 NOTIFICATION DATE DELIVERY MODE 05/21/2021 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): ipdocket@iptech.law patents@onsemi.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte SW WANG, CH CHEW, EIJI KUROSE, and HOW KIAT LIEW Appeal 2020-003987 Application 15/679,666 Technology Center 2800 Before ADRIENE LEPIANE HANLON, TERRY J. OWENS, and JULIA HEANEY, Administrative Patent Judges. HEANEY, Administrative Patent Judge. DECISION ON APPEAL STATEMENT OF THE CASE Pursuant to 35 U.S.C. § 134(a), Appellant1 appeals from the Examiner’s decision to reject claims 5–20. See Final Act. 1. We have jurisdiction under 35 U.S.C. § 6(b). We REVERSE. 1 We use the word Appellant to refer to “applicant” as defined in 37 C.F.R. § 1.42. Appellant identifies the real party in interest as Semiconductor Components Industries. Appeal Br. 3. Appeal 2020-003987 Application 15/679,666 2 CLAIMED SUBJECT MATTER The claims are directed to a method for forming semiconductor packages. Independent claims 5 and 14, reproduced below, are illustrative of the claimed subject matter: 5. A method for forming semiconductor packages, the method comprising: providing a wafer, the wafer comprising a first side and a second side; forming a plurality of bumps on the first side of the wafer, the bumps comprising a first layer and a second layer; forming one or more grooves between the bumps on the first side of the wafer, the one or more grooves having a predetermined depth into the wafer; overmolding the plurality of bumps with a mold compound; grinding the mold compound to expose a face of the plurality of bumps; grinding the second side of the wafer to singulate a plurality of die comprised in overmolding the second side of the wafer; and singulating the mold compound between the plurality of die to form a plurality of semiconductor packages, the plurality of die fully encapsulated within the mold compound except for the face of the plurality of bumps. 14. A method for forming semiconductor packages, the method comprising: providing a wafer, the wafer comprising a first side and a second side; forming a first set of bumps on the first side of the wafer, the first set of bumps comprising a first metal; forming a second set of bumps on the first set of bumps, the second set of bumps comprising a second metal different from the first metal; sawing one or more grooves between the first set of bumps and the second set of bumps on the first side of the wafer; overmolding the first side of the wafer with a mold compound to encapsulate the first set of bumps and the second set of bumps; Appeal 2020-003987 Application 15/679,666 3 grinding the mold compound to expose a face of the second set of bumps; grinding the second side of the wafer to singulate a plurality of die comprised in the wafer; overmolding the second side of the wafer; and singulating the mold compound between the plurality of die to form a plurality of semiconductor packages, the plurality of die being fully encapsulated within the mold compound except for the face of the second set of bumps. REFERENCES The prior art relied upon by the Examiner is: Name Reference Date Okuno US 6,579,748 B1 June 17, 2003 Kato US 2001/0018229 A1 Aug. 30, 2001 REJECTIONS Claims Rejected 35 U.S.C. § Reference(s)/Basis 5–20 112(a) Written Description 5–20 103 Okuno, Kato OPINION Written Description Support The Examiner finds that there is “no original support and description for overmolding the second side of the wafer then grinding it to singulate the wafer” in claims 5 and 14, because the wafer no longer exists after the step of grinding the wafer to singulate a plurality of die. Final Act. 4–5. Appellant argues that Figures 2E, 2F, and 2G of the Specification show that the wafer exists after the step of grinding a second side of the wafer. Appeal Br. 14. The Appellant argues that the Specification consistently refers to a “wafer” in steps subsequent to grinding the second Appeal 2020-003987 Application 15/679,666 4 side, such that a person of ordinary skill in the art would understand that the wafer exists throughout the steps illustrated in Figures 2E, 2F, and 2G. Id. at 14–15 (citing Spec. ¶¶ 40–41); Reply Br. 3. We are not persuaded that “overmolding the second side of the wafer” fails to comply with the written description requirement. The Specification describes that the wafer exists throughout the steps of forming the semiconductor package, until the final step when it is singulated into a plurality of semiconductor packages. See Spec. ¶¶ 38–41; Figs. 2A–2G. Moreover, the Examiner acknowledges that a wafer still exists after the step of “grinding the second side of the wafer to singulate a plurality of die comprised in the wafer.” Answer 5 (stating it was known in the art that “the combination of the singulated dies and encapsulate 48 is a reconstituted wafer”). Accordingly, we reverse the rejection. Obviousness of Claims 5–20 Claim 5 The Examiner finds Okuno discloses a method for forming semiconductor packages including forming a plurality of bumps, and “the type of bumps is not particularly limited.” Final Act. 6 (citing Okuno 6:25– 30). The Examiner acknowledges that Okuno does not teach its bumps as comprising a first and a second layer. Id. The Examiner finds that Kato teaches forming semiconductor packages having bumps formed of a first layer of copper and a second layer of gold, or vice-versa. Id. at 6 (citing Kato ¶ 58, Figs. 5A–B). The Examiner determines it would have been obvious to a person of ordinary skill in the art to form such bumps to obtain a reliable joint of solder bumps and a circuit board. Id. at 6–7 (citing Kato ¶¶ 57–58). Appeal 2020-003987 Application 15/679,666 5 Appellant argues that the rejection fails to establish a prima facie case because Kato’s intermediate electrode 7, upon which the Examiner relies as corresponding to a layer of the claimed bump, is inserted between LSI electrode 2 and solder bump 3. Appeal Br. 20. Appellant argues that Kato teaches intermediate electrode 7 is an element separate from the solder bumps. Id. Appellant’s argument is persuasive of reversible error. Kato explains that intermediate electrode 7 is inserted between bump 3 and another element. Kato ¶ 57. In other words, Kato discloses intermediate electrode 7 is a different structure than bump 3, and does not support the Examiner’s finding that intermediate electrode 7 is a layer of bump 3. Further, the Examiner’s determination that “the only structural characteristics required by the claimed bumps is to comprise a first and second layers ...” and Kato’s bumps “meet those structural characteristics” (Answer 8) is reversible error because Kato’s bumps are separate structures from its intermediate electrodes. Accordingly, we reverse the rejection of claim 5, and claims 6–13 which depend from claim 5. Claim 14 As with the rejection of claim 5, the Examiner determines that although Okuno does not disclose the claimed structure of “the first set of bumps comprising a first metal, forming a second set of bumps on the first set of bumps, the second bumps comprising a second metal different from the first metal” (Final Act. 9), it would have been obvious to form first and second sets of bumps for similar reasons as described in the rejection of claim 5. Id. at 10. Appeal 2020-003987 Application 15/679,666 6 We reverse the rejection of claim 14 for the same reasons as discussed above for claim 5, and we reverse the rejections of claims 15–20 which depend from claim 14. CONCLUSION The Examiner’s rejections are reversed. DECISION SUMMARY Claims Rejected 35 U.S.C. § Reference(s)/Basis Affirmed Reversed 5–20 112(a) Written Description 5–20 5–20 103 Okuno, Kato 5–20 Overall Outcome 5–20 REVERSED Copy with citationCopy as parenthetical citation