Petersson, Sture et al.Download PDFPatent Trials and Appeals BoardApr 22, 202013462060 - (D) (P.T.A.B. Apr. 22, 2020) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 13/462,060 05/02/2012 Sture Petersson 4019020-188295 5644 23570 7590 04/22/2020 PORTER WRIGHT MORRIS & ARTHUR, LLP INTELLECTUAL PROPERTY GROUP 41 SOUTH HIGH STREET 29TH FLOOR COLUMBUS, OH 43215 EXAMINER LEE, SHUN K ART UNIT PAPER NUMBER 2884 NOTIFICATION DATE DELIVERY MODE 04/22/2020 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): ipdocket@porterwright.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte STURE PETERSSON, GÖRAN THUNGSTRÖM, STANISLAV POSPISIL, TOMAS SLAVICEK, and DAVID KRAPOHL Appeal 2019-003887 Application 13/462,060 Technology Center 2800 Before JEFFREY T. SMITH, LINDA M. GAUDETTE, and MONTÉ T. SQUIRE, Administrative Patent Judges. GAUDETTE, Administrative Patent Judge. DECISION ON APPEAL1 The Appellant2 appeals under 35 U.S.C. § 134(a) from the Examiner’s decision finally rejecting claims 1, 2, 5, 7–18, 20–25, 27, 31, and 32.3 We AFFIRM. 1 This Decision includes citations to the following documents: Specification filed May 2, 2012 (“Spec.”); Final Office Action dated February 1, 2018 (“Final”); Appeal Brief filed January 18, 2019 (“Appeal Br.”); Examiner’s Answer dated February 19, 2019 (“Ans.”); and Reply Brief filed April 19, 2019 (“Reply Br.”). 2 We use the word “Appellant” to refer to “applicant” as defined in 37 C.F.R. § 1.42. The Appellant identifies the real party in interest as the inventors. Appeal Br. 1. 3 We have jurisdiction under 35 U.S.C. § 6(b). Appeal 2019-003887 Application 13/462,060 2 CLAIMED SUBJECT MATTER Claim 1, reproduced below, is illustrative of the claimed subject matter: 1. A neutron detector comprising: a silicon-based semiconductor detector substrate having a front side and a back side; a first electrical contact present on said front side and comprising an electrically conductive neutron converting layer, wherein said neutron converting layer is made of titanium diboride, has a thickness of from about 100 nm to about 1 μm, and forms an ohmic contact with said silicon-based semiconductor detector substrate; and a second electrical contact present on said back side and comprising an electrically conductive layer. Appeal Br. 41, Claims Appendix. REFERENCES The Examiner relies on the following prior art as evidence of unpatentability: Name Reference Date Dreifus US 5,382,808 Jan. 17, 1995 Lott US 5,726,453 Mar. 10, 1998 Lacy US 2005/0258373 A1 Nov. 24, 2005 Choi et al, Electrical Characteristics of TiB2 for ULSI Applications, IEEE Transactions on Electron Devices, Vol. 39, no. 10 (October, 1992), pp. 2341–2345 (“Choi”). Appeal 2019-003887 Application 13/462,060 3 McGregor et al. Microstructured semiconductor neutron detectors, Nuclear Instruments and Methods in Physics Research A, Vol. 608, no. 1 (June 2009), pp. 125-131. Mireshghi et al. High Efficiency Neutron Sensitive Amorphous Silicon Pixel Detectors, IEEE transactions on Nuclear Science, Vol. 41, no. 4 (August 1994), pp. 915-921. Sato et al. Plasma CVD-Grown 10B-Enriched Boron Films for Si Neutron Detectors, Japanese Journal of Applied Physics, Vol. 29, no. 11 (November 1990), pp. 2526-2530. REJECTIONS The Examiner maintains the following rejections under 35 U.S.C. § 103(a): 1. Claims 1, 2, 9–16, 20–23, 25, and 27 are rejected over Lott in view of Choi. 2. Claim 5 is rejected over Lott in view of Choi and Lacy. 3. Claims 7 and 8 are rejected over Lott in view of Choi and McGregor. 4. Claims 9–11, 17, 18, and 24 are rejected over Lott in view of Choi and Mireshghi. 5. Claims 12 and 13 are rejected over Lott in view of Choi and Dreifus. 6. Claims 31 and 32 are rejected under over Lott in view of Choi and Sato. Appeal 2019-003887 Application 13/462,060 4 OPINION As an initial matter, we note that the Appellant argues that the Examiner improperly relies on references that were not cited in any rejection statement. See Appeal Br. 12 (referencing the Examiner’s citation to Becker, et al, US 2005/0208218, in the Final Office Action, page 21); Reply Br. 3 (referencing the Examiner’s citations (Ans. 4, 8) to Sun et al, Determination of degradation constant of Li ion from 10B(n,ay)7Li reaction in various media, Proceedings in Radiochemistry A Supplement to Radiochimica Acta, Vol. 1, no. 1 (1 September 2011), pp. 317–322); Reply Br. 4–5 (referencing the Examiner’s citations to Becker in the Answer, pages 4 and 7); cf. Reply Br. 1 (arguing that in the Answer, page 3, footnote 1, the Examiner relies on a dictionary definition but fails to provide the Appellant with a copy thereof). Because we do not rely on these references in our Decision, we need not determine whether the Examiner’s citations were improper. We now turn to the merits of the appeal. The Examiner rejected claims 1, 2, 9–16, 20–23, 25, and 27 as unpatentable over Lott in view of Choi. Final 3; see above-listed ground of rejection 1. Lott discloses a neutron detector comprising a silicon-based substrate (P-type semiconductor layer 16 on one side and N-type semiconductor layer 14 on the other side). Lott 3:47–60. Lott discloses that “electrical contacts are made to the semiconductor active region 14, 16 by means of the conductive substrate 12 and a thin conductive contact 18.” Lott 4:1–3. “The contact 18 preferably has a thickness of from about 0.075 to 1 micron, and is made of any suitable material such as gold, platinum, aluminum, titanium or nickel.” Lott 4:7–10. Lott discloses that “neutron detector 10 includes a neutron converter layer 22 which generates charged Appeal 2019-003887 Application 13/462,060 5 particles when the layer is impinged by neutrons. The neutron converter layer may comprise a relatively thin film or coating, or may comprise a doped region of the device.” Lott 4:21–25. Lott teaches that “[s]uitable materials for the neutron converter layer 22 include Li-containing materials such as LiF, Li2O and lithium metal, and B-containing materials such as ZrB2, B4C, H3BO3 and elemental boron.” Lott 4:32–35. Lott discloses that “neutron converter layer 22 may be deposited directly on the semiconductor active region 14, 16[,] . . . . [and] used as an electrical contact in place of the contact 18. For example, the contact 18 may be doped with Li to serve a dual purpose as an electrical contact and a neutron converter layer.” Lott 4:39–45. Citing to the above disclosure, the Examiner found that Lott discloses the claim 1 invention except for “a first electrical contact present on said front side and comprising an electrically conductive neutron converting layer, wherein said neutron converting layer is made of titanium diboride” (claim 1 (emphasis added)). Final 3–4. The Examiner found that “ohmic contacts on silicon substrates are well known in the art,” and cited Choi for a teaching that an ohmic contact comprising titanium diboride was a known, conventional electrical contact. Id. at 4 (citing Choi 2341, right col.; 2344, left col.). The Examiner determined that “it would have been obvious to one having ordinary skill in the art at the time of the invention to provide a known conventional electrical contact (e.g., an ohmic contact comprising titanium boride) as the unspecified electrical contact of Lott.” Id. at 5. The Appellant argues that although Lott mention’s boron-containing materials and elemental boron for use in a neutron converting layer, Lott does not disclose that these materials serve the dual purpose of acting as a neutron converter layer and as an electrical contact. Appeal Br. 11. In Appeal 2019-003887 Application 13/462,060 6 support of this argument, the Appellant relies on the declaration testimony of Dr. Sture Petersson (Declaration under 37 C.F.R. § 1.132, executed Dec. 13, 2017 (“Decl.”)), one of the named inventors. See Appeal Br. 11. Based on Dr. Petersson’s description of his education and work experience, we find that Dr. Petersson is an expert in the field of semiconductor technology and neutron detection, and is qualified to testify as to the level of ordinary skill in the art at the time of the invention. See Decl. ¶ 1. Dr. Petersson testified that neither Lott nor Choi discloses that “titanium diboride was known by those of ordinary skill in the art for use as a neutron converter.” Decl. ¶ 4. Dr. Petersson testified that “none of the boron-containing materials mentioned in Lott for use as the neutron converter layer can be used to achieve a combined electrically conductive contact and neutron converter functions [sic] with high efficiency.” Id. ¶ 3. Dr. Petersson further testified that “Choi would have [led] one of ordinary skill in the art away from the use of titanium diboride as an electrically conducting layer.” Id. ¶ 4. Citing to disclosure in Todorović et al, Thin Solid Films, 300:272-277 (1997) (cited in the June 19, 2017 Information Disclosure Statement) and Choi et al, Journal of Applied Physics, 69(11):7853 (1991) (“Choi 1991”) (cited in the June 19, 2017 Information Disclosure Statement), Dr. Petersson testified that the ordinary artisan would have understood that annealing at 1000 ⁰C would be necessary to render a TiB2 film capable of forming an ohmic contact; however, the ordinary artisan would have been dissuaded from annealing at a high temperature because Choi discloses that this results in boron diffusion for TiB2 into a silicon-based substrate and increased contact resistance. Id. ¶ 5. Appeal 2019-003887 Application 13/462,060 7 Having considered the Examiner’s and the Appellant’s respective positions together with the record evidence, we agree with the Examiner that a preponderance of the evidence weighs in favor of obviousness as to claim 1. See Ans. 5–11. As found by the Examiner (see Ans. 3), Lott discloses that [t]he neutron converter layer may comprise a relatively thin film or coating, or may comprise a doped region of the device. The composition of the neutron converter layer 22 is selected such that upon impingement by neutrons, charged particles such as 1H, 3H, 7Li and 4He ions are generated. Species capable of generating such charged particles include 6Li, 10B, H, and 3He. Lott 4:23–29. This disclosure supports the Examiner’s determination that Lott suggests that boron-containing materials are suitable for use as the neutron converter layer and that the ordinary artisan would have understood that the boron-containing materials explicitly identified in Lott—ZrB2, B4C, H3BO3 and elemental boron (Lott 4:34–35)—are merely exemplary. See Ans. 7. We have considered Dr. Petersson’s testimony that “none of the boron-containing materials mentioned in Lott for use as the neutron converter layer can be used to achieve a combined electrically conductive contact and neutron converter functions [sic] with high efficiency” (Decl. ¶ 3). However, we do not find this testimony relevant to the issue of obviousness because claim 1 does not require that the electrical contact, or neutron converting layer, function with high efficiency. Cf. Ex parte Obiaya, 227 USPQ 58, 60 (BPAI 1985) (“The fact that appellant has recognized another advantage which would flow naturally from following the suggestion of the prior art cannot be the basis for patentability when the difference would otherwise have been obvious.”); Spec. 8:1–2 (indicating that TiB2 is merely a preferred material for the neutron converting layer). Appeal 2019-003887 Application 13/462,060 8 We also are unpersuaded by Dr. Petersson’s testimony that “Choi would have lead [sic] one of ordinary skill in the art away from the use of titanium diboride as an electrically conducting layer” (Decl. ¶ 4), because neither Dr. Petersson nor the Appellant has addressed the Examiner’s finding that the various drawbacks that Dr. Petersson identifies relate to the properties of TiB2 deposited on n-type Si (Ans. 9). See, e.g., Reply Br. 5–8. As found by the Examiner, Lott discloses that a neutron converter layer deposited directly on p-type Si can be used as an electrical contact, and Choi discloses the TiB2/p-Si Schottky diodes show ohmic characteristics. Ans. 9; see Lott Fig. 1, 3:47–49, 4:39–41; Choi 2344, Conclusion. Thus, the Examiner has identified teachings in the prior art as to which boron- containing materials likely would “serve a dual purpose as an electrical contact and a neutron converter layer” (Lott 4:39–45). See PharmaStem Therapeutics, Inc. v. ViaCell, Inc., 491 F.3d 1342, 1364 (Fed Cir. 2007) (explaining that an obviousness rejection predicated on selection of one or more components from numerous possible choices may be appropriate if the prior art provides direction as to which of many possible choices is likely to be successful); see also Sud-Chemie, Inc. v. Multisorb Techs., Inc., 554 F.3d 1001, 1009 (Fed. Cir. 2009) (“[E]vidence of unexpected results and other secondary considerations will not necessarily overcome a strong prima facie showing of obviousness”); In re Am. Acad. of Sci. Tech. Ctr., 367 F.3d 1359, 1368 (Fed. Cir. 2004) (explaining that the Board is entitled to weigh declarations expressing opinions as to fact and conclude that the lack of factual corroboration warrants discounting the opinions expressed in the declarations); In re Bulina, 362 F.2d 555, 559 (CCPA 1966) (“[A]n affidavit Appeal 2019-003887 Application 13/462,060 9 by an applicant or co-applicant as to the advantages of his invention is less persuasive than one made by a disinterested person.”). In sum, based on our consideration of the totality of the record before us, having considered the prima facie case of obviousness along with Appellant’s arguments and evidence, we conclude that the preponderance of evidence weighs in favor of obviousness of the claimed subject matter within the meaning of §103. See In re Oetiker, 977 F.2d 1443, 1445 (Fed. Cir. 1992). As to the first ground of rejection, the Appellant presents separate arguments in support of patentability of the following claim groupings: (1) claim 2; (2) claims 9–11; (3) claims 12–14; (3) claim 15; (4) claim 25; and (5) claim 27. Appeal Br. 21–27. The Examiner has addressed these arguments in the Answer (see Ans. 11–14), and identified disclosure in Lott and Choi that support the Examiner’s conclusion of obviousness as to these claims. See also Final 5–12. Accordingly, we sustain the rejection of claims 1, 2, 9–16, 20–23, 25, and 27 over Lott in view of Choi. As to above-listed grounds of rejection 2–6, we have considered the Appellant’s arguments, but find them unpersuasive of reversible error for the reasons explained in detail by the Examiner. See Ans. 14–23; see also Final 13–20. Accordingly, we also sustain these grounds of rejection. DECISION SUMMARY Claims Rejected 35 U.S.C. § Reference(s)/Basis Affirmed Reversed 1, 2, 9–16, 20–23, 25, 27 103(a) Lott, Choi 1, 2, 9–16, 20–23, 25, 27 5 103(a) Lott, Choi, Lacy 5 Appeal 2019-003887 Application 13/462,060 10 Claims Rejected 35 U.S.C. § Reference(s)/Basis Affirmed Reversed 7, 8 103(a) Lott, Choi, McGregor 7, 8 9–11, 17, 18, 24 103(a) Lott, Choi, Mireshghi 9–11, 17, 18, 24 12, 13 103(a) Lott, Choi, Dreifus 12, 13 31, 32 103(a) Lott, Choi, Sato 31, 32 Overall Outcome: 1, 2, 5, 7– 18, 20–25, 27, 31, 32 TIME PERIOD FOR RESPONSE No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a). AFFIRMED Copy with citationCopy as parenthetical citation