LG Display Co., Ltd.Download PDFPatent Trials and Appeals BoardJul 27, 202014629538 - (D) (P.T.A.B. Jul. 27, 2020) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 14/629,538 02/24/2015 Youngjang LEE 041501-7184 2084 9629 7590 07/27/2020 Morgan, Lewis & Bockius LLP (WA) 1111 Pennsylvania Avenue, N.W. Washington, DC 20004 EXAMINER TRAN, DZUNG ART UNIT PAPER NUMBER 2829 NOTIFICATION DATE DELIVERY MODE 07/27/2020 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): karen.catalano@morganlewis.com patents@morganlewis.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE ________________________ BEFORE THE PATENT TRIAL AND APPEAL BOARD ____________ Ex parte YOUNGJANG LEE, KYUNGMO SON, SEONGPIL CHO, JAEHOON PARK, SOHYUNG LEE, SANGSOON NOH, MOONHO PARK, SUNGJIN LEE, SEUNGHYO KO, and MIJIN JEONG ________________________ Appeal 2019-004572 Application 14/629,538 Technology Center 2800 ________________________ Before N. WHITNEY WILSON, DEBRA L. DENNETT, and LILAN REN, Administrative Patent Judges. WILSON, Administrative Patent Judge. DECISION ON APPEAL Appellant1 appeals under 35 U.S.C. § 134(a) from the Examiner’s August 9, 2018 decision finally rejecting claims 1–8, 10, 12–18, and 22–25. We have jurisdiction over the appeal under 35 U.S.C. § 6(b). An oral hearing was held on July 22, 2020, a transcript of which will be made part of the record. We AFFIRM IN PART. 1 We use the word “Appellant” to refer to “applicant” as defined in 37 C.F.R. § 1.42. Appellant identifies LG Display Co. Ltd. as the real party in interest. (Appeal Br. 3). Appeal 2019-004572 Application 14/629,538 2 CLAIMED SUBJECT MATTER Appellants’ disclosure is directed to a thin film transistor substrate which can be used for displays with low power consumption (Abstract, Spec. ¶¶ 8–9). The claimed substrate includes a substrate, a first thin film transistor (TFT) including a first gate electrode disposed at a first area of the substrate, and second TFT including a second gate electrode and an oxide semiconductor layer disposed at a second area of the substrate (Abstract). A nitride layer is disposed on only the first area of the substrate and covers the first gate electrode, but not the second gate electrode (id.). The nitride layer is disposed under an oxide layer which in turn is disposed over the first and second gate electrodes and under the oxide semiconductor layer (Spec. ¶¶ 49, 50, and 52). Details of the claimed invention are set forth in independent claim 1, which is reproduced below from the Claims Appendix of the Appeal Brief (with the relevant phrases emphasized): 1. A display, comprising: a first area; a second area; a first thin film transistor disposed at the first area, the first thin film transistor comprising: a polycrystalline semiconductor layer; a first gate electrode on the polycrystalline semiconductor layer; a first source electrode; and a first drain electrode; a second thin film transistor disposed at the second area, the second thin film transistor comprising: Appeal 2019-004572 Application 14/629,538 3 a second gate electrode; an oxide semiconductor layer on the second gate electrode; a second source electrode; and a second drain electrode; a nitride layer disposed at only the first area, the nitride layer covering the first gate electrode, without covering the second gate electrode; and an oxide layer disposed: over the first gate electrode and the second gate electrode; directly on and contacting the nitride layer in the first area; and directly under and contacting the oxide semiconductor layer in the second area wherein the nitride layer is disposed between the first gate electrode and the oxide layer in the first area. REJECTIONS I. Claims 1, 3, 4, 7, 8, 10, 12, 17, 18, and 20 are provisionally rejected on the grounds of nonstatutory double patenting over claims 1–7, 9, and 10 of the ’357 Application.2 2 US Application No. 14/628,357. The ’357 Application has matured into US Patent No. 10,186,528 (issued January 22, 2019). It does not appear that the claims were amended between the time of the Final Action in the case on appeal and issuance of the ’528 Patent. Accordingly, while the rejection is Appeal 2019-004572 Application 14/629,538 4 II. Claims 2 and 5 are provisionally rejected on the ground of nonstatutory double patenting over claim 1 of the ’357 Application in view of Yan.3, 4 III. Claim 6 is provisionally rejected on the ground of nonstatutory double patenting over claim 1 of the ’357 Application in view of Lee.5, 6 IV. Claims 1–5, 7–10, 12–15, 17–20, 22, and 23–257 are rejected under 35 U.S.C. § 103 as unpatentable over Kimura,8 in view of Yang,9 as evidenced by Yamada.10 V. Claims 8, 10, 18, and 20 are rejected under 35 U.S.C. § 103 as unpatentable over Kimura and Yang, and further in view of Isobe.11 VI. Claims 6 and 16 are rejected under 35 U.S.C. § 103 as unpatentable over Kimura and Yang, and further in view of Lee. DISCUSSION Rejections I, II, and III. Appellant argues all of these rejections as a group (Appeal Br. 12). Accordingly, we select claim 1 as representative and denoted in the Final Action as “provisional,” we will address the arguments on the merits as though it had been made over the issued patent. 3 See Footnote 2, supra. 4 Yan et al., US 2013/0168666 A1, published July 4, 2013. 5 See Footnote 2, supra. 6 Lee, US 2004/0075783 A1, published April 22, 2004. 7 Claims 24 and 25 are not specifically recited in the recitation of the rejection (Final Act. 12), but are enumerated in discussing the rejection (Final Act. 20) and are, therefore, presumed to be subject to this rejection. 8 Kimura, US 2010/0193785 A1, published August 5, 2010. 9 Yang et al., US 2013/0015448 A1, published January 17, 2013. 10 Yamada et al., US 2004/0016924 A1, published January 29, 2004. 11 Isobe et al., US 2006/0246644 A1, published November 2, 2006. Appeal 2019-004572 Application 14/629,538 5 will focus our discussion on the double patenting rejection of claim 1. Our analysis will apply to each of the claims subject to these rejections. Appellant focuses on the following limitation of claim 1 as representing the difference between the claims on appeal and the claims of the ‘357 Application: “an oxide layer disposed . . . directly on and contacting the nitride layer in the first area; and directly under and contacting the oxide semiconductor layer in the second area.” In particular, Appellant argues that the claims of the ‘357 Application do not recite that the nitride layer is in contact with the oxide layer and the oxide semiconductor layer, and that the Examiner has not provided an explanation on why that difference is not patentably distinct (Appeal Br. 10–11). The judicial doctrine of obviousness-type double patenting precludes an applicant from extending the term of protection for a patented invention by claiming an obvious variant of the patented invention in a subsequent patent application. See In re Longi, 759 F.2d 889, 892 (Fed. Cir. 1985). In determining whether the claim 1 of the application on appeal is an obvious variant over claim 1 of the ‘357 Application, it is appropriate to review the Specification of the ‘357 Application in order to understand the scope of its claim 1. Eli Lilly & Co. v. Teva Parenteral Medicines, Inc., 689 F.3d 1368, 1378‒79 (Fed. Cir. 2012) The Examiner finds that the Specification of the ‘357 Application specifically states that the oxide layer is in direct contact with the nitride layer (Ans. 3–4). Thus, the proper construction of the phrase “under the oxide layer” as used in claim 1 of the ‘357 Application would include “an oxide layer disposed . . . directly on and contacting the nitride layer” as used in claim 1 on appeal. In other words, claim 1 on appeal is somewhat Appeal 2019-004572 Application 14/629,538 6 narrower than claim 1 of the ‘357 Application, but is clearly covered by it. The Examiner determines that the difference in scope between the claims is not of patentable significance. Appellant has not provided an explanation of why that determination is reversibly erroneous. Accordingly, we determine that Appellant has not demonstrated reversible error in the nonstatutory double patenting rejections. Should prosecution resume, the Examiner will wish to consider whether the provisional rejections should be made non-provisional in light of the issuance of the ‘357 Application as US Patent No. 10,186,528. Rejections IV, V, and VI. Appellant argues all of the claims together (see, Appeal Br. 21), so we will focus our analysis on the rejection of claim 1. The remaining claims will stand or fall with claim 1. Appellant presents two general arguments seeking reversal of the prior art rejections. We address each in turn. Argument 1. The Examiner finds, with reference to FIG. 6, that Kimura discloses “an oxide layer (Fig. 6, (201); [0160] that is disposed (a) over the first gate electrode (104A) and the second gate electrode,” (b) “directly on and contracting the nitride layer in the first area,” and (c) “directly under and contacting the oxide semiconductor layer 202(a) in the second area” (Final Act. 13): Appeal 2019-004572 Application 14/629,538 7 Kimura’s FIG. 6 illustrates a manufacturing step of a semiconductor device. The Examiner further finds that Kimura’s insulating layer 201 is a stacked-layer which contains both silicon oxide and silicon nitride layers and that, based on Yamada, it appears that the silicon nitride layer is under the oxide layer, allowing the oxide layer to contact the oxide semiconductor layer 202(A) (Final Act. 13). The Examiner’s finding is supported by the following excerpt from Kimura: [160] The insulating layer 201 can be formed by a single layer structure or a stacked-layer structure of a siloxane resin; a film, of silicon oxide (SiOx), silicon nitride (SiNx), silicon oxynitride (SiOxNy) (x>y), silicon nitride oxide (SiNxOy) (x>y), or the like; a film containing carbon, such as a DLC (diamond-like carbon); an organic material such as epoxy, polyimide, polyamide, polyvinyl phenol, benzocyclobutene, or acrylic; or an insulating film containing oxygen or nitrogen. Note that a siloxane resin corresponds to a resin having Si–O–Si bonds. Siloxane includes a skeleton structure of a bond of silicon (Si) and oxygen (O). As a substituent, an organic group containing at least hydrogen (such as an alkyl group or aromatic hydrocarbon) is used. Alternatively, a fluoro group, or a fluoro group and an organic group containing at least hydrogen can be used as a substituent. [0161] It is preferable that a portion of the insulating layer 201 in contact with a semiconductor layer 202, which is provided Appeal 2019-004572 Application 14/629,538 8 later, be silicon nitride (SiNx). The semiconductor layer 202 includes hydrogen in some case. In that case, reacting the hydrogen included in the semiconductor layer 202 and the insulating layer 201 can be prevented by using silicon nitride (SiNx) as the insulating layer 201. (Kimura, ¶¶ 160, 161, emphasis added). Appellant points (Appeal Br. 16) to the first sentence in paragraph 161 as evidence that Kimura does not teach that the oxide layer is on top of the nitride layer, because it suggests a preference for having the top layer (in contact with the semiconductor layer) be silicon nitride: “It is preferable that a portion of the insulating layer 201 in contact with a semiconductor layer 202, which is provided later, be silicon nitride (SiNx)” (Kimura, ¶ 161). This argument is not persuasive, because although Kimura states a preference for having the nitride layer be the top sublayer in the insulating layer 201 (which would be outside the scope of claim 1), by indicating that this is the preferred arrangement, it clearly suggests the arrangement relied on by the Examiner in the rejection, where the nitride layer is under the oxide layer, as recited in the claim. A reference is not limited to its preferred embodiment, but must be evaluated for all of its teachings, including its teachings of non-preferred embodiments. See In re Burckel, 592 F.2d 1175, 1179 (CCPA 1979). Argument 2. Appellant’s second argument is that none of the applied references, either alone or in combination, suggests or otherwise renders obvious the nitride layer that is on only the first area of the substrate, covering the first gate electrode without covering the second gate electrode, and has specific spatial relationships with the other layers (i.e. disposed Appeal 2019-004572 Application 14/629,538 9 under the oxide layer, which in turn is disposed under the oxide semiconductor layer) (Appeal Br. 18–19). The Examiner, finding that this limitation is not taught by Kimura, relies on Yang to teach this element, finding that Yang teaches a nitride layer 222 disposed on only the first area of the display 101 without covering the second gate electrode 142, as shown in FIG. 13: FIG. 13 is a schematic diagram illustrating a semiconductor device and a fabrication method thereof according an embodiment of Yang. The Examiner concludes that: It would have been obvious to a person of ordinary skill in the art before the effective filing date of the invention to modify claim 1 of Kimura '785 as taught by Yang '448 to have a nitride layer disposed on only the first area of the display, the nitride layer covering the first gate electrode, without covering the second gate electrode in order to provide nitride layer over the first channel layer composed of polycrystalline silicon to obtain Appeal 2019-004572 Application 14/629,538 10 a top gate type thin film transistor having improved characteristics (as evidenced by Yamada '924, see Abstract, para. [0012]-[0016]) and to diminish hydrogenation of the second channel layer composed of oxide semiconductor, thereby ensuring semiconductor property of the second channel layer, and thus protecting the semiconductor properties of the second channel layer (see para. [0037]) to obtain a semiconductor device with advanced electrical performance (see para. [0007]-[0009]). (Final Act. 13–14). Appellant argues (Appeal Br. 19) that Kimura teaches away from the claimed arrangement where the nitride layer is not present in the second region and over the second gate electrode because Kimura states a preference for having the nitride layer in contact with the oxide semiconductor layer, in order to prevent reacting the hydrogen included in the semiconductor layer 202 and the insulating layer (Kimura ¶ 161). Yang teaches precisely the opposite, explaining why a person of skill in the art might have sought to avoid having the nitride layer in the same region as the oxide semiconductor layer in order to prevent the tendency of hydrogen atoms to diffuse to the second channel layer 20 during formation of the second interlayered dielectric layer 222 and ensuring the semiconductor property of the second channel layer 20 (Yang ¶ 37). The Examiner has not adequately explained why a person of skill in the art would have credited Yang’s teaching over Kimura’s teaching in order to modify Kimura’s structure. In other words, while the Examiner has shown that Yang might offer, in a vacuum, some rationale to modify Kimura’s structure as needed to meet the claim limitations, Kimura itself expressly rejects that reasoning. The Examiner has not explained why a Appeal 2019-004572 Application 14/629,538 11 person of skill in the art would reject Kimura’s teachings in favor of Yang in order to modify Kimura’s structure. Accordingly, we reverse the rejection. Moreover, because the limitation in question is common to each of the claims, we also reverse the prior art rejections for all of the claims. Appeal 2019-004572 Application 14/629,538 12 CONCLUSION In summary: Claims Rejected Grounds/35 U.S.C. § Reference(s)/Basis Affirmed Reversed 1, 3, 4, 7, 8, 10, 12, 17, 18, 20 Nonstatutory double patenting US Application 14/628,357 1, 3, 4, 7, 8, 10, 12, 17, 18, 20 2, 5 Nonstatutory double patenting US Application 14/628,357, Yan 2, 5 6 Nonstatutory double patenting US Application 14/628,357, Lee 6 1–5, 7–10, 12–15, 17– 20, 22–25 103 Kimura, Yang, Yamada 1–5, 7–10, 12–15, 17–20, 22–25 8, 10, 18, 20 103 Kimura, Yang, Yamada, Isobe 8, 10, 18, 20 6, 16 103 Kimura, Yang, Yamada, Lee 6, 16 Overall Outcome 1–8, 10, 12, 17, 18, 20 13–16, 22–25 No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(1). AFFIRMED IN PART Copy with citationCopy as parenthetical citation