Ex Parte so et alDownload PDFBoard of Patent Appeals and InterferencesAug 19, 200810992086 (B.P.A.I. Aug. 19, 2008) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE ____________ BEFORE THE BOARD OF PATENT APPEALS AND INTERFERENCES ____________ Ex parte MYEONG-SEOB SO, and BYOUNG-DEOG CHOI ____________ Appeal 2008-2488 Application 10/992,086 Technology Center 2800 ____________ Decided: August 19, 2008 ____________ Before THOMAS A. WALTZ, ROMULO H. DELMENDO, and KAREN M. HASTINGS, Administrative Patent Judges. WALTZ, Administrative Patent Judge. DECISION ON APPEAL Appellants seek review under 35 U.S.C. § 134 from the Examiner’s rejections of claims 1, 2, 6-8, 12, and 13 in the final Office Action dated Appeal 2008-2488 Application 10/992,086 June 2, 20061. This Board has jurisdiction under 35 U.S.C. § 6(b). For the reasons below, the Examiner’s rejection is affirmed. The present invention is directed to a thin film transistor (“TFT”) having channel and gate electrodes made of polysilicon and the source and drain areas and the gate electrodes comprising specified combinations of n- type and p-type doping impurities. Claims 1 and 6 are illustrative and reproduced below: 1. A thin film transistor, comprising: a semiconductor thin film having a channel area and n-type or p-type impurity-doped source and drain areas, the semiconductor thin film formed of polysilicon; a gate electrode formed in a position corresponding to the channel area, the gate electrode formed of polysilicon; a gate insulating layer, which insulates the semiconductor thin film and the gate electrode; and source and drain electrodes, which are connected to each of the source and drain areas of the semiconductor thin film, wherein the gate electrode is n-type or p-type impurity doped with impurities different from the impurities doped in the source and drain areas for changing a work function of the gate electrode; and 1 In the Final Office Action, pending claims 1-3, 5, 6, 8, 9, 12, and 13 were rejected. In an after-final amendment, filed September 5, 2006, Appellants cancelled claims 3-5 and 9, as well as amending other pending claims. In an Advisory Action dated September 25, 2006, the Examiner revised the rejection of claims 1 and 6 pursuant to 35 U.S.C. § 103(a) rather than § 102(b). Ans. 3. 2 Appeal 2008-2488 Application 10/992,086 wherein a threshold voltage is modulated by changing a work function difference between the gate electrode and the semiconductor thin film. 6. A CMOS thin film transistor, comprising: an NMOS thin film transistor comprising a first semiconductor thin film having a channel area and n-type impurity-doped source and drain areas, a first gate electrode formed in a position corresponding to the channel area of the first semiconductor thin film, a first gate insulating layer, which insulates the first semiconductor thin film and the first gate electrode, and first source and drain electrodes, which are connected to each of the first source and drain areas of the first semiconductor thin film; and a PMOS thin film transistor comprising a second semiconductor thin film having a channel area and p-type impurity-doped source and drain areas, a second gate electrode formed in a position corresponding to the channel area of the second semiconductor thin film, a second gate insulating layer, which insulates the second semiconductor thin film and the second gate electrode, and second source and drain electrodes, which are connected to each of the second source and drain areas of the second semiconductor thin film, wherein the first semiconductor thin film, the second semiconductor thin film, the first gate electrode, and the second gate electrode are formed of polysilicon; the first gate electrode is p-type impurity doped for changing a work function of the first gate electrode; 3 Appeal 2008-2488 Application 10/992,086 a threshold voltage of the NMOS thin film transistor is modulated by changing a work function difference between the first gate electrode and the first semiconductor thin film; the second gate electrode is n-type impurity doped for changing a work function of the second gate electrode; and a threshold voltage of the PMOS thin film transistor is modulated by changing a work function difference between the second gate electrode and the second semiconductor thin film. The Examiner relies on the following prior art as evidence of unpatentability: Reedy 5,895,957 Apr. 20, 1999 Hu US 2004/0227137 A1 Nov. 18, 2004 The following rejection is presented by the Appellants for review: 1. Claims 1-2, 6-8, and 12-13 stand rejected under 35 U.S.C. § 103(a) as obvious over Reedy in view of Hu. FINDINGS OF FACT (FF) 1. Reedy discloses a thin film transistor, left transistor in Fig. 2, col. 8, ll. 60-65, col. 11, ll. 32-37, comprising a semiconductor thin film, Fig. 2B (28), col. 11, ll. 32-33, having a channel area, (44), col. 44, l. 20, and inherently with p-type impurity doped source (42S) and drain (42D) areas. 2. Reedy discloses that the semiconductor thin film is formed of silicon, col. 11, l. 45, a gate electrode (48) is formed in a position corresponding to the channel area (apparent in Fig. 2E), the gate 4 Appeal 2008-2488 Application 10/992,086 electrode formed of polysilicon, col. 12, ll. 44, col. 13, l. 46, a gate insulating layer (40), col. 12, l. 43, which insulates the semiconductor thin film and the gate electrode; and source and drain electrodes (64), col. 15, ll. 4-7, which are connected to each of the source and drain areas of the semiconductor thin film (apparent in Fig. 2E), wherein the gate electrode is n-type or p-type impurity doped, col. 8, ll. 33-37, col. 14, l. 25, with impurities different from the impurities doped in the source and drain areas (N-gate on P-channel), col. 13, ll. 64-65, col. 14, ll. 5-6, for changing a work function of the gate electrode, col. 13, ll. 13-15, 45-47, 58-61; col. 14, ll. 15-16, 32-36; and wherein a threshold voltage is modulated by changing a work function difference between the gate electrode and the semiconductor thin film (inherent in changing the gate electrode work function; col. 13, l. 45 – col. 14, l. 36). 3. Hu discloses that both P-type and N-type conventional CMOS thin film transistors (“TFT”) had been known in the art which utilized polysilicon for the semiconductor thin film (referred to therein as “polysilicon island 104”). The polysilicon island includes a channel region, a source region and a drain region. ¶ 0009. 4. Hu discloses that polysilicon thin film transistors had been studied “with much effort”, and that polysilicon thin film transistors can be made smaller, increasing the aperture ratio of the pixel [on an LCD display] and thereby enhancing the brightness of the LCD. Using polysilicon TFTs in a LCD consumes less energy to achieve the same brightness. Performance and reliability are improved, and the cost of fabricating a LCD is lowered when using polysilicon TFTs. ¶ 0006. 5 Appeal 2008-2488 Application 10/992,086 5. Reedy discloses that: “P+ and N+ polysilicon gate materials, used in various combinations in N-type MOSFETS and P- type MOSFETS, are useful in designing and fabricating digital and analog circuits, voltage reference circuits and memory type circuits. . . . The material may be different or the same for each transistor type . . . depending on the desired threshold voltage.” Col. 13, ll. 45-51, 58-60. PRINCIPLES OF LAW KSR Int'l Co. v. Teleflex, Inc., 127 S.Ct. 1727, 1734 (2007), states that “Section 103 forbids issuance of a patent when ‘the differences between the subject matter sought to be patented and the prior art are such that the subject matter as a whole would have been obvious at the time the invention was made to a person having ordinary skill in the art to which said subject matter pertains.’” Graham v. John Deere Co., 383 U.S. 1, 17-18 (1966), holds that the question of obviousness is resolved on the basis of underlying factual determinations including (1) the scope and content of the prior art, (2) any differences between the claimed subject matter and the prior art, (3) the level of skill in the art, and (4) where in evidence, so-called secondary considerations. “When a work is available in one field of endeavor, design incentives and other market forces can prompt variations of it, either in the same field or a different one. If a person of ordinary skill can implement a predictable variation, §103 likely bars its patentability. For the same reason, if a technique has been used to improve one device, and a person of ordinary 6 Appeal 2008-2488 Application 10/992,086 skill in the art would recognize that it would improve similar devices in the same way, using the technique is obvious unless its actual application is beyond his or her skill.” KSR, 127 S. Ct. at 1740. In re Fulton, 391 F.3d 1195, 1201 (Fed. Cir. 2004), holds that “The prior art's mere disclosure of more than one alternative does not constitute a teaching away from any of these alternatives because such disclosure does not criticize, discredit, or otherwise discourage the solution claimed in the . . . application.” “A prior art reference teaches away from a combination if it suggests that the line of development flowing from the reference’s disclosure is unlikely to be productive of the result sought by applicant.” In re Gurley, 27 F.3d 551, 553 (Fed. Cir. 1994) The fact that a prior art reference does not expressly disclose a particular embodiment is not controlling; the question under 35 U.S.C. § 103(a) is not what the references expressly teach, but what they would have suggested to one of ordinary skill in the art at the time the invention was made. In re Lamberti, 545 F.2d 747, 750 (CCPA 1976). DISCUSSION Obviousness over Reedy in view of Hu The pending claims, 1-2, 6-8 and 12-13, stand rejected under 35 U.S.C. § 103(a) as obvious over Reedy in view of Hu. Appellants only argue the patentability of claims 1 and 6. See, App. Br. 5-11. Appellants do not separately argue the patentability of claims 2 and 12, which depend on claim 1, or of claims 7, 8 or 13, which depend on claim 6. Therefore, we 7 Appeal 2008-2488 Application 10/992,086 treat claims 1, 2, and 12 as a group and claims 6-8 and 13 as a group, with claims 1 and 6, respectively, as representative of these groups and all other claims stand or fall together with the representative claims. 37 C.F.R. §41.37(c)(1)(vii). Claims 1 and 6 The Examiner rejected Claims 1 and 6 as obvious over Reedy in view of Hu, finding that Reedy taught all elements of the claimed invention except that the silicon semiconductor thin film is polysilicon, FFs 1 and 2. The Examiner found that Hu is analogous art and taught that polysilicon- based TFTs are widely known due to the advantages of polysilicon over other forms of silicon in such applications. FF 3. The Examiner then found Appellants’ invention to be an obvious substitution of the polysilicon TFT of Hu with the TFT of Reedy. Ans. 5. Appellants traverse the rejection, first by arguing there is no motivation in either Reedy or Hu for the substitution, even though they acknowledge the substitution of polysilicon may be possible. App. Br. 6-8, Reply Br. 6-7. We disagree. Hu teaches the advantages of using polysilicon, as known in the art. FF 4. Hu also teaches that use of polysilicon for the semiconductor thin film (referred to as “polysilicon island 104”) in Hu was already known and practiced in the art. FF 3. “If a technique has been used to improve one device, and a person of ordinary skill in the art would recognize that it would improve similar devices in the same way, using the technique is obvious unless its actual application is beyond his or her skill.” KSR, 127 S. Ct. at 1740. We determine that one of ordinary skill in the art would have recognized that the substitution of the polysilicon island in Hu would improve the device described in Reedy, using 8 Appeal 2008-2488 Application 10/992,086 known techniques. We also determine that Hu provides a motivation for substituting polysilicon in the thin film transistor of Reedy. FF 4. Accordingly, we determine that one of ordinary skill would have found that substitution obvious. Appellants next traverse the rejection by arguing that substituting the polysilicon of Hu with the TFT of Reedy would render Reedy unsuitable for its intended purpose. App. Br. 9-10. We do not find this argument persuasive, as neither prior art reference suggests that the line of development flowing from either reference’s disclosure is unlikely to be productive of the result sought by applicant. Gurley, 27 F.3d at 553. The fact that the teachings of one reference used in a rejection may not be optimal with the objectives of another reference in the combination does not preclude the rejection. “The prior art’s mere disclosure of more than one alternative does not constitute a teaching away from any of these alternatives because such disclosure does not criticize, discredit, or otherwise discourage the solution claimed in the . . . application.” Fulton, 391 F.3d at 1201. We determine that Appellants have not shown the Examiner has reversibly erred in combining the references as stated in the Answer. Claim 6 Appellants further traverse the rejection of claim 6, particularly, over Reedy and Hu by arguing that Reedy does not teach the particular combination of p and n doped materials used for the source and drain areas and for the gate electrode in the PMOS and NMOS. App. Br. 10-11, Reply Br. 8-11. Appellants describe the examples of various embodiments of the invention disclosed in Reedy and assert that none teach the present claimed invention, namely, a CMOS, comprising a PMOS having a p-type impurity- 9 Appeal 2008-2488 Application 10/992,086 doped source and drain area and an n-type impurity-doped gate electrode, and an NMOS having an n-type impurity-doped source and drain area and a p-type gate electrode. Id. Even assuming arguendo Appellants’ assessment of the examples in Reedy is accurate, we find their argument unpersuasive. The examples of the embodiments in Reedy were not exhaustive of the teachings overall. See FF 5. We, therefore, find as fact that the general disclosure in Reedy would have suggested to one of ordinary skill in the art various combinations of p-type and n-type impurity doped components in NMOS and PMOS, including that claimed by Appellants. Lamberti, 545 F.2d at 750. Accordingly, we find Appellants have failed to show the Examiner reversibly erred. CONCLUSION For the foregoing reasons, we sustain the rejection of claims 1 and 6, and of claims 2, 7, 8 and 12-13 by representation, under § 103(a) as obvious over Reedy in view of Hu. TIME PERIOD FOR RESPONSE No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(1)(iv). AFFIRMED cam 10 Appeal 2008-2488 Application 10/992,086 H.C. PARK & ASSOCIATES, PLC 8500 LEESBURGH PIKE SUITE 7500 VIENNE, VA 22182 11 Copy with citationCopy as parenthetical citation