Ex Parte SidhwaDownload PDFBoard of Patent Appeals and InterferencesJul 9, 200910437871 (B.P.A.I. Jul. 9, 2009) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE ____________ BEFORE THE BOARD OF PATENT APPEALS AND INTERFERENCES ____________ Ex parte ARDESHIR J. SIDHWA ____________ Appeal 2009-003481 Application 10/437,8711 Technology Center 2800 ____________ Decided:2 July 10, 2009 ____________ Before MAHSHID D. SAADAT, SCOTT R. BOALICK, and KARL EASTHOM, Administrative Patent Judges. BOALICK, Administrative Patent Judge 1 Application filed May 13, 2003. The real party in interest is STMicroelectronics, Inc. 2 The two-month time period for filing an appeal or commencing a civil action, as recited in 37 C.F.R. § 1.304, begins to run from the decided date shown on this page of the decision. The time period does not run from the Mail Date (paper delivery) or Notification Date (electronic delivery). Appeal 2009-003481 Application 10/437,871 2 DECISION ON APPEAL This is an appeal under 35 U.S.C. § 134(a) from the final rejection of claims 20-27, 30-33, 35-39, 44-48, 50 and 51. Claims 28 and 40-43 have been allowed and claim 49 has been indicated to be allowable if rewritten in independent form. We have jurisdiction under 35 U.S.C. § 6(b). We affirm. STATEMENT OF THE CASE Appellant’s invention relates to a method of depositing very thick layers of metal (e.g., 20,000 to 30,000 Å (Spec. 4:7-8)) using multiple deposition chambers. (Spec. 1:4-6.) The thick layers of metal are deposited on a semiconductor chip. (Spec. 1:4-5.) Claim 27 is exemplary: 27. A semiconductor structure, comprising: a semiconductor substrate having a conductive region therein; a first insulating layer formed over the substrate; a first metal layer formed on top of the first insulating layer; an interconnect structure used to connect the first metal layer to the conductive region of the substrate; a second insulating layer formed on top of the first metal layer[;] a second metal layer formed on top of the second insulating layer; a third insulating layer formed on top of the second metal layer; Appeal 2009-003481 Application 10/437,871 3 a third metal layer formed on top of the third insulating layer; a fourth insulating layer formed on top of the third metal layer; and an upper metal layer formed overlying the fourth insulating layer, the upper metal layer having a thickness that is in excess of 25,000 angstroms, wherein said upper metal layer includes a first sublayer and a second sublayer, the first and second sublayers having a same grain alignment and being continuous with each other to form a single contiguous upper metal layer. The prior art relied upon by the Examiner in rejecting the claims on appeal is: Abiru US 6,747,355 B2 Jun. 8, 2004 (filed Jul. 17, 2002) Harada US 6,476,491 B2 Nov. 5, 2002 (filed Jan. 10, 2001) Shih3 US 6,329,722 B1 Dec. 11, 2001 Mitchell US 5,773,359 Jun. 30, 1998 Rao US 4,514,265 Apr. 30, 1985 Claims 20-25, 27, 30-33, 35-37, 39, 44-48, 50 and 51 stand rejected under 35 U.S.C. § 103(a) as being obvious over Harada and Mitchell. Claims 26 and 38 stand rejected under 35 U.S.C. § 103(a) as being obvious over Harada, Mitchell and Abiru. Rather than repeat the arguments of Appellant or the Examiner, we refer to the Brief and the Answer for their respective details. Except as 3 Shih was cited by the Examiner for evidentiary purposes to illustrate a semiconductor device bond pad having a thickness of 1 to 3 microns. (Ans. 8, 10.) Similarly, Rao was cited by the Examiner to illustrate a bonding pad having a thickness of 6 to 8 microns. (Ans. 8, 10.) Appeal 2009-003481 Application 10/437,871 4 noted in this decision, Appellant has not presented any substantive arguments directed separately to the patentability of the dependent claims or related claims in each group. In the absence of a separate argument with respect to those claims, they stand or fall with the representative independent claim. See 37 C.F.R. § 41.37(c)(1)(vii). Only those arguments actually made by Appellant has been considered in this decision. Arguments that Appellant did not make in the Brief have not been considered and are deemed to be waived. See id. ISSUE Appellant argues that the Examiner has not established a prima facie case of obviousness in rejecting claims 20-27, 30-33, 35-39, 44-48, 50 and 51. (Br. 7.) In particular, Appellant argues that the combination of Harada and Mitchell does not teach or suggest an “upper metal layer having a thickness that is in excess of 25,000 angstroms” and “first and second sublayers having a same grain alignment and being continuous with each other to form a single contiguous upper metal layer,” as recited in independent claim 27. (Br. 7-12.) Appellant presents similar arguments regarding independent claims 31, 37 and 44 (Br. 12-16), which recite similar limitations as independent claim 27. Appellant’s arguments present the following issue: Has Appellant shown that the Examiner erred in finding that the combination of Harada and Mitchell teaches an “upper metal layer having a thickness that is in excess of 25,000 angstroms” and “first and second sublayers having a same grain alignment and being continuous with each other to form a single contiguous upper metal layer?” Appeal 2009-003481 Application 10/437,871 5 FINDINGS OF FACT The record supports the following findings of fact (FF) by a preponderance of the evidence. Harada 1. Harada is related to a “semiconductor device having a multilayer wiring structure and pad electrodes protected from corrosion.” (Col. 1, ll. 10-12.) Harada describes forming a pad electrode 26 including a metal wiring film 25 “with a thickness of 1.0 μm or more.” (Col. 10, ll. 34-36; fig. 2G.) Metal wiring film 25 includes an aluminum alloy layer 25b. (Col. 10, ll. 29-30; fig. 2G.) Mitchell 2. Mitchell relates to “interconnect systems for semiconductor components.” (Col. 1, ll. 7-8.) An interconnect system 31 includes a metal layer 23, an under bump metallurgy 25 and an interconnect bump 29. (Col. 2, ll. 7-9; fig. 2.) Metal layer 23 “preferably comprises aluminum” (col. 2, l. 16) and has “a thickness of approximately 1-3 microns” in a preferred embodiment (col. 2, ll. 22- 23). “Metal layer 23 is formed or fabricated over substrate 21 using, for example, conventional sputtering, photolithographic, and etching processes.” (Col. 2, ll. 17-20.) Shih 3. Shih relates to “interconnection and packaging of [an] integrated circuit having copper bond pads.” (Col. 1, ll. 7-9.) Shih describes a Appeal 2009-003481 Application 10/437,871 6 semiconductor device 11 with a bonding pad 100 attached to a wire bond 130. (Col. 4, ll. 15-16; fig. 1A.) In a preferred embodiment, the bond pad 100 is composed of copper/tin and has a thickness of 1 to 3 microns. (Col. 6, ll. 26-27.) Rao 4. Rao describes forming a bonding pad 50 on a device 30. (Col. 3, ll. 36-41; fig. 6.) The bonding pad 50 can be composed of gold with a thickness of 6 to 8 microns. (Abstract.) Specification 5. In the “Background of the Invention,” Appellant provides a general statement of potential problems which may occur during the deposition of a thick metal layer. (Spec. 2:8-15.) For a very thick metal layer, Appellant discloses that “metal grains are often abnormal and discontinuities result[ ] in loss of yield due to abnormal grain growth” and “grain growth may vary drastically within the deposition chamber.” (Spec. 2:9-11.) The Specification provides no description of experimental conditions for depositing the thick metal layer or any characterization of the grain structure. 6. In one embodiment for forming the thick layer, Appellant describes that “the metal layer 24 has a first portion, or sublayer, 26 and a second portion, or sublayer, 28.” (Spec. 6:11-12; fig. 4.) “In some embodiments, the grain structure will not be uniform throughout and Appeal 2009-003481 Application 10/437,871 7 the orientation may change, but a single metal layer still results.” (Spec. 7:1-3.) PRINCIPLES OF LAW On appeal, all timely filed evidence and properly presented arguments are considered by the Board. See In re Piasecki, 745 F.2d 1468, 1472 (Fed. Cir. 1984). In the examination of a patent application, the Examiner bears the initial burden of showing a prima facie case of unpatentability. Id. When that burden is met, the burden then shifts to the Applicant to rebut. Id. The Board has broad discretion as to the weight to be given declarations offered in the course of prosecution, and it may properly decline to accord weight to declaration statements unsupported by corroborating documentation. In re Am. Acad. of Sci. Tech. Ctr., 367 F.3d 1359, 1368 (Fed. Cir. 2004). Furthermore, opinion evidence in a declaration has little value without factual support. In re Beattie, 974 F.2d 1309, 1313 (Fed. Cir. 1992); see also In re Lindell, 385 F.2d 453, 456 (CCPA 1967) (Although an affiant’s or declarant’s opinion on the ultimate legal issue is not evidence in the case, “some weight ought to be given to a persuasively supported statement of one skilled in the art on what was not obvious to him.” (emphasis added)). If the Applicant produces rebuttal evidence of adequate weight, the prima facie case of unpatentability is dissipated. See Piasecki, 745 F.2d at 1472. Thereafter, patentability is determined in view of the entire record. Id. However, on appeal to the Board it is the Appellant’s burden to establish that the Examiner did not sustain the necessary burden and to show that the Examiner erred. See In re Kahn, 441 F.3d 977, 985-86 (Fed. Cir. 2006). Appeal 2009-003481 Application 10/437,871 8 During examination of a patent application, a claim is given its broadest reasonable construction consistent with the specification. In re Prater, 415 F.2d 1393, 1404-05 (CCPA 1969). “[T]he words of a claim ‘are generally given their ordinary and customary meaning.’” Phillips v. AWH Corp., 415 F.3d 1303, 1312 (Fed. Cir. 2005) (en banc) (internal citations omitted). The “ordinary and customary meaning of a claim term is the meaning that the term would have to a person of ordinary skill in the art in question at the time of the invention, i.e., as of the effective filing date of the patent application.” Id. at 1313. The determination of patentability in a product-by-process claim is based on the product itself, even though the claim may be limited and defined by the process. In re Luck, 476 F.2d 650, 653 (CCPA 1973). That is, the product in such a claim is unpatentable if it is the same as or obvious from the product of the prior art, even if the “prior product was made by a different process.” In re Thorpe, 777 F.2d 695, 697 (Fed. Cir. 1985). “[T]he Patent Office bears a lesser burden of proof in making out a case of prima facie obviousness for product-by-process claims because of their peculiar nature than . . . when a product is claimed in the conventional fashion.” In re Fessmann, 489 F.2d 742, 744 (CCPA 1974). “Where a product-by- process claim is rejected over a prior art product that appears to be identical, although produced by a different process, the burden is upon the applicants to come forward with evidence establishing an unobvious difference between the claimed product and the prior art product.” In re Marosi, 710 F.2d 799, 803 (Fed. Cir. 1983). Appeal 2009-003481 Application 10/437,871 9 ANALYSIS We do not find Appellant’s arguments that the Examiner erred in rejecting claims 20-27, 30-33, 35-39, 44-48, 50 and 51 under 35 U.S.C. § 103(a) to be meritorious. Claims 20-25, 27, 30-33, 35-37, 39, 44-48, 50 and 51 Appellant’s arguments (Br. 7-12) that the combination of Harada and Mitchell does not teach or suggest an “upper metal layer having a thickness that is in excess of 25,000 angstroms” and “first and second sublayers having a same grain alignment and being continuous with each other to form a single contiguous upper metal layer,” as recited in independent claim 27, are not persuasive. The Examiner found that the aluminum alloy layer 25b of Harada corresponds to the claimed “metal layer.” (Ans. 4; FF 1.) The Examiner acknowledged that Harada teaches that the metal wiring film 25 is formed “with a thickness of 1.0 μm [10,000 angstroms] or more” (Ans. 4; FF 1) and cites Mitchell for the disclosure of a metal layer 23 with a thickness of 1 to 3 microns (10,000 to 30,000 angstroms) (Ans. 5; FF 2.) The Examiner also interpreted the limitation “first and second sublayers having a same grain alignment and being continuous with each other to form a single contiguous upper metal layer” as a product-by-process limitation because “the claims are directed towards [a] product, the process of forming this product is only considered in view of the final structural product formed,” which is disclosed by the combination of Harada and Mitchell. (Ans. 10-11.) The Examiner further interpreted the claim language “sublayer” as a portion of a single grain. (Ans. 12-13.) Thus, the Examiner concluded, if a “first sublayer” was one portion of a single grain and a “second sublayer” was Appeal 2009-003481 Application 10/437,871 10 another portion of the same grain, then the first sublayer and second sublayer would have “a same grain alignment.” (Ans. 12-13.) Under the broadest reasonable construction of the claim consistent with the Specification, we agree with the Examiner. Appellant argues that “a person skilled in the art would not construe Harada’s metal wiring film 25 as encompassing a contiguous metal layer having a thickness in excess of 25,000 angstroms.” (Br. 7.) Appellant also argues that a “thick deposition of metal layers in the prior art results in discontinuities in metal grain and bad grain structure that can potentially cause lower conductivity.” (Br. 8.) To support these positions, Appellant submitted an Affidavit by Richard A. Blanchard, Ph.D., dated November 28, 2006 (“First Blanchard Aff.”), which was accompanied by additional evidence.4 (Br. 7-8.) We are neither persuaded by the First Blanchard Affidavit nor the additional evidence cited therein. 4 As additional evidence, the First Blanchard Affidavit cites: (1) MICHAEL QUIRK ET AL., SEMICONDUCTOR MANUFACTURING TECHNOLOGY 303 (Prentice-Hall 2001) (“Quirk”) (“The upper noncritical layers on a wafer (e.g., metal layer with bonding pads) can range up to 20,000 Å thick”); (2) M. Igarashi et al., The Best Combination of Aluminum and Copper Interconnects for a High Performance 0.18μm CMOS Logic Device, INT’L ELECTRON DEVICES MEETING TECHNICAL DIG. 831 tbl. 1 (1998) (“Igarashi”) (disclosing that copper layers “Metal-5” and “Metal-6” have a thickness of 1.33μm); (3) J. T. Pan et al., Integrated Interconnect Module Development, VMIC CONF. 47 (1996) (“Pan”) (“Metal stack thickness ranged from 0.6 μm to greater than 1.0 μm, and consisted of Ti/TiN barrier layer, Al-Si-Cu metallization, and TiN anti-reflective-coating layer”); (4) P. Quintana et al., Thickness Effects on Aluminum Thin Films, 9 SUPERFICIES Y VACIO [SURFACE AND VACUUM] 280 (1999) (“Quintana”) (“Roughness measurements made on the AFM images show a linear increase with thickness and an asintotic behavior with time after growth”); and (5) G. Vergason et al., Selection of Materials and Techniques for Performance Appeal 2009-003481 Application 10/437,871 11 First, to support the position that “a person skilled in the art would not construe Harada’s metal wiring film 25 as encompassing a contiguous metal layer having a thickness in excess of 25,000 angstroms” (Br. 7), the First Blanchard Affidavit relies on Quirk, Igarashi and Pan (First Blanchard Aff. ¶¶ 8-10). The First Blanchard Affidavit states that this evidence illustrates that “a person skilled in the art . . . would not be motivated or suggested to design a contiguous metal layer in excess of 25,000 angstroms.” (First Blanchard Aff., ¶¶ 8-10.) However, this evidence merely illustrates several instances in which the thickness of an upper metal layer of a semiconductor structure is under 25,000 Å. It does not rebut the disclosure in Mitchell of a metal layer 23 having a thickness of 1 to 3 microns (10,000 to 30,000 angstroms). (FF 2.) Likewise, this evidence does not rebut the disclosure in Shih of a copper/tin bond pad 100 with a thickness of 1 to 3 microns (10,000 to 30,000 angstroms) (FF 3) or the disclosure in Rao of a gold bonding pad with a thickness of 6 to 8 microns (60,000 to 80,000 angstroms) (FF 4). Furthermore, Quirk, Igarashi and Pan do not disclose any negative characteristic associated with depositing an upper metal layer in excess of 25,000 Å. Thus, the First Blanchard Affidavit’s statement that “a person skilled in the art . . . would not be motivated or suggested to design a contiguous metal layer in excess of 25,000 angstroms” (First Blanchard Aff., ¶¶ 8-10) lacks persuasive factual support. Second, to support the position that a “thick deposition of metal layers in the prior art results in discontinuities in metal grain and bad grain Coatings, 42ND ANN. TECH. CONF. PROC. 55 (Society of Vacuum Coaters 1999) (“Vergason”) (“As shown in Figure 5 the roughness [of aluminum] in most cases, increases with coating thickness”). Appeal 2009-003481 Application 10/437,871 12 structure that can potentially cause lower conductivity” (Br. 8), the First Blanchard Affidavit relies upon page 2, lines 8-15 of the Specification, in addition to Quintana and Vergason (First Blanchard Aff. ¶¶ 11-13). However, page 2, lines 8-15 of the Specification merely provides a general statement of potential problems which may occur during deposition of a thick metal layer (i.e., “metal grains are often abnormal” and “grain growth may vary drastically within the deposition chamber” (emphasis added)). (FF 5.) The Specification does not provide any experimental conditions (e.g., deposition technique or deposition parameters) or experimental characterization of the metal layer (e.g., grain structure, conductivity as a function of film thickness or analysis of surface roughness) to document abnormal grain growth, nor does it state how frequently the potential problems result. (See FF 5.) The First Blanchard Affidavit further cites Quintana and Vergason to illustrate that the roughness of a metal layer increases with thickness and contends that “increasing . . . thickness would have the undesirable effect of decreasing conductivity” (First Blanchard Aff. ¶¶ 12-13). However, Quintana and Vergason do not describe surface roughness as a negative characteristic or provide a relationship between surface roughness and reduced conductivity. Furthermore, the Specification does not describe any relationship between surface roughness of the metal layer and reduced conductivity. Thus, the First Blanchard Affidavit’s statement that increasing the thickness of the metal layer “would have the undesirable effect of decreasing conductivity” (First Blanchard Aff., ¶¶ 12-13) lacks persuasive factual support. Therefore, we find that the First Blanchard Affidavit does not establish that “a person skilled in the art would not construe Harada’s metal Appeal 2009-003481 Application 10/437,871 13 wiring film 25 as encompassing a contiguous metal layer having a thickness in excess of 25,000 angstroms” (Br. 7). Likewise, we find that the First Blanchard Affidavit does not establish that a “thick deposition of metal layers in the prior art results in discontinuities in metal grain and bad grain structure that can potentially cause lower conductivity” (Br. 8). Appellant further argues that the conventional sputtering techniques used to form the metal layer 23 of Mitchell in excess of 25,000 angstroms would result in grain non-uniformity, grain discontinuities and other undesirable effects. (Br. 10-12.) To support this position, Appellant submitted a Second Affidavit by Richard A. Blanchard, Ph.D., dated June 25, 2007 (“Second Blanchard Aff.”). (Br. 10-12.) We are not persuaded by the Second Blanchard Affidavit. The Second Blanchard Affidavit relies upon page 2, lines 8-15 of the Specification as evidence that the metal layer 23 of Mitchell is deficient (Second Blanchard Aff., ¶ 7). As discussed above, this paragraph provides a general statement of potential problems which may occur during the deposition of thick metal layers and provides no experimental conditions or experimental characterization of the metal layer to illustrate abnormal grain growth, nor does it state how frequently the potential problems result. (FF 5.) Furthermore, Mitchell does not provide information in any detail about the “conventional sputtering” of the metal layer 23 (e.g., model of the sputtering apparatus or deposition parameters) (see FF 2). Because of the multitude of unknown experimental variables, the Second Blanchard Affidavit has not established that the properties of the metal film 23 of Mitchell can be accurately characterized as stated in the Second Blanchard Affidavit based on the disclosure of page 2, lines 8-15 of the Specification. Appeal 2009-003481 Application 10/437,871 14 The Second Blanchard Affidavit has provided no additional evidence to support the disclosure in paragraphs 8-10. Thus, the Second Blanchard Affidavit’s statement that “[a] person skilled in the art would therefore understand that Mitchell’s conventionally fabricated metal layer 23 would exhibit . . . defects, if attempts are made to provide said metal layer with a thickness in excess of 25,000 angstroms” (Second Blanchard Aff., ¶ 10) lacks persuasive factual support. Therefore, we find that the Second Blanchard Affidavit does not establish that the conventional sputtering techniques used to form the metal layer 23 of Mitchell in excess of 25,000 angstroms would result in grain non-uniformity, grain discontinuities and other undesirable effects. Appellant further argues that the combination of Harada and Mitchell does not teach or suggest the limitation of “first and second sublayers having a same grain alignment and being continuous with each other to form a single contiguous upper metal layer.” (Br. 8-9, 10-12.) We do not find this argument persuasive. The Examiner interpreted the claim limitation of “first and second sublayers having a same grain alignment and being continuous with each other to form a single contiguous upper metal layer” as a product-by-process limitation. (Ans. 10-11.) In articulating that the final product of “a single contiguous upper metal layer” was taught by the combination of Harada and the metal layer 23 of Mitchell (Ans. 10-11), the Examiner provided a rationale tending to show that “a single contiguous upper metal layer” of claim 27 appears to be the same or similar to the metal layer 23 of Mitchell. Therefore, the burden shifted to Appellant to come forward with evidence establishing an unobvious difference between the claimed product and the Appeal 2009-003481 Application 10/437,871 15 prior art product. However, Appellant has not provided any convincing evidence to illustrate that “a single contiguous upper metal layer” of claim 27 possesses an unobvious difference over the metal layer 23 of Mitchell. The Examiner also interpreted the claim language “sublayer” as a portion of a single grain. (Ans. 12-13.) Using this claim interpretation, the Examiner found that a “first sublayer” corresponded to one portion of a single grain and a “second sublayer” corresponded to another portion of the same grain. Thus, the Examiner concluded, the first sublayer and second sublayer would have “a same grain alignment.” (Ans. 12-13.) Under the broadest reasonable interpretation consistent with the Specification, we agree with the Examiner that the combination of Harada and Mitchell teaches the limitation of “first and second sublayers having a same grain alignment and being continuous with each other to form a single contiguous upper metal layer.” Appellant’s Specification describes that, in one embodiment, “the metal layer 24 has a first portion, or sublayer, 26 and a second portion, or sublayer, 28.” (FF 6.) In other words, a “sublayer” can be reasonably construed as any “portion” of the metal layer, including a portion of a single grain. (Id.) We agree with the Examiner that one portion of a single grain of the metal layer 23 of Mitchell corresponds to a “first sublayer” and another portion of the same grain corresponds to a “second sublayer.” Appellant has not pointed to any particular definition of “sublayer” in the Specification that would require a different interpretation. Therefore, Appellant has not shown that the Examiner erred in finding that the combination of Harada and Mitchell teaches the limitations “upper metal layer having a thickness that is in excess of 25,000 angstroms” and “first and second sublayers having a same grain alignment and being Appeal 2009-003481 Application 10/437,871 16 continuous with each other to form a single contiguous upper metal layer,” as recited in claim 27. We conclude that Appellant has not shown that the Examiner erred in rejecting claim 27 under 35 U.S.C. § 103(a) as being obvious over Harada and Mitchell. Independent claims 31, 37 and 44 recite limitations similar to those in claim 27. Thus, we conclude that Appellant has not shown that the Examiner erred in rejecting independent claims 31, 37 and 44 for the reasons discussed above with respect to claim 27. Because Appellant has not presented separate arguments regarding claims 20-25, 30, 32, 33, 35, 36, 39, 45-48, 50 and 51, we affirm the rejection of these claims under 35 U.S.C. § 103(a) for the same reasons as claims 27, 31, 37 and 44, from which they depend. Claims 26 and 38 Although Appellant nominally argues the rejection of dependent claims 26 and 38 separately (Br. 17), the arguments presented do not point out with particularity or explain why the limitations of the dependent claims are separately patentable. Instead, Appellant summarily alleges that these claims are nonobvious because “Abiru does not supply the missing teachings of Harada and/or Mitchell.” (Br. 17.) Because Appellant has not persuasively rebutted the Examiner’s prima facie case of obviousness for dependent claims 26 and 38 based on the teachings of Harada and Mitchell, we will sustain the rejection of claims 26 and 38 for the reasons discussed with respect to independent claims 27 and 37, from which claims 26 and 28 depend. Appeal 2009-003481 Application 10/437,871 17 CONCLUSION Based on the findings of facts and analysis above, we conclude that Appellant has not shown that the Examiner erred in rejecting claims 20-27, 30-33, 35-39, 44-48, 50 and 51 under 35 U.S.C. § 103(a). DECISION The rejection of claims 20-27, 30-33, 35-39, 44-48, 50 and 51 under 35 U.S.C. § 103(a) is affirmed. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(1)(iv). AFFIRMED rvb STMICROELECTRONICS, INC. MAIL STATION 2346 1310 ELECTRONICS DRIVE CARROLLTON, TX 75006 Copy with citationCopy as parenthetical citation