Ex Parte PendseDownload PDFPatent Trial and Appeal BoardSep 29, 201713965356 (P.T.A.B. Sep. 29, 2017) Copy Citation United States Patent and Trademark Office UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O.Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 13/965,356 08/13/2013 Rajendra D. Pendse 2515.0037 CON6 5320 112165 7590 10/03/2017 STATS ChipPAC/PATENT LAW GROUP: Atkins and Associates, P.C. 55 N. Arizona Place, Suite 104 Chandler, AZ 85225 EXAMINER LEE, HSIEN MING ART UNIT PAPER NUMBER 2823 NOTIFICATION DATE DELIVERY MODE 10/03/2017 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): main@plgaz.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte RAJENDRA D. PENDSE Appeal 2017-0008731 Application 13/965,356 Technology Center 2800 Before MICHAEL P. COLAIANNI, JEFFREY B. ROBERTSON, and MICHAEL G. McMANUS, Administrative Patent Judges. COLAIANNI, Administrative Patent Judge. DECISION ON APPEAL 1 The real party in interest as indicated in the Appeal Brief is “STATS ChipPAC, Ltd.” Appeal 2017-000873 Application 13/965,356 Appellant appeals under 35 U.S.C. § 134 the final rejection of claims 7—25. We have jurisdiction over the appeal pursuant to 35 U.S.C. § 6(b). Claims 34—36 are objected to as being dependent upon a rejected base claim but would be allowable if written in independent form including all the limitations of the base claim and are not on appeal. (Final Act. 13). We AFFIRM. Appellant’s invention is directed to a flip chip interconnection in a semiconductor package and a method of manufacturing (Spec. 12). Claim 7 is illustrative: 7. A method of making a semiconductor device, comprising: providing a substrate [312]; forming a trace [355] including an interconnect site over a surface of the substrate; and forming a composite interconnect structure including a collapsible portion [347] and a non-collapsible portion [345]; and disposing the composite interconnect structure over the interconnect site of the trace. Bracketed reference numerals were added to map the claim limitations to Appellant’s Figure 13. Appellant appeals the following rejections: 1. Claims 7—10, 12, 14—17, 19, 21, 22, and 24 are rejected 35 U.S.C. § 102(b) as anticipated by Bentlage (US 5,798,285, pat. Aug. 25, 1998). 2. Claims 14, 17, and 19 are rejected under 35 U.S.C. § 102(a) as anticipated by Yeh (US 2004/0035909 Al, pub. Feb. 26, 2004). 2 Appeal 2017-000873 Application 13/965,356 3. Claims 11, 13, 18, 20, 23, and 25 are rejected under 35 U.S.C. § 103(a) as unpatentable over Bentlage in view of Lin (US 2004/0126927 Al, pub. Jul. 1, 2004). 4. Claims 15 and 16 are rejected under 35 U.S.C. § 103(a) as unpatentable over Yeh in view of Smith (US 2002/0041036 Al, pub. Apr. 11,2002). 5. Claims 18 and 20 are rejected under 35 U.S.C. § 103(a) as unpatentable over Yeh in view of Lin. Appellant’s arguments focus on subject matter in independent claims 7, 14, and 21 and dependent claim 8 (Br. 6-13). Rejections (3) to (5) under 35 U.S.C. § 103(a) are not separately argued (App. Br. 14). Accordingly, the claims under rejections (3) to (5) will stand or fall with our analysis of the argued claims under the § 102 rejections. FINDINGS OF FACT & ANALYSIS CLAIM 7 The Examiner finds that Bentlage teaches the subject matter of claim 7 including forming a composite interconnect structure including a collapsible portion and a non-collapsible portion and disposing the composite interconnect structure over the interconnect site of the trace (Final Act. 3—4). The Examiner finds that Bentlage teaches disposing the composite interconnect structure 36 over the interconnect site 60 of the trace 24 when contacting both the substrate 22 with the collapsible portion 38 and a chip 26 with the non-collapsible portion 37 followed by a reflow process (Final Act. 4; see Bentlage, Fig. 11). The Examiner finds that Bentlage teaches contacting solder bump 37 (C4) with solder bump 38 and then 3 Appeal 2017-000873 Application 13/965,356 reflowing the solder to form the solder joint (i.e., a two-step technique) (Ans. 4). The Examiner finds that claim 7 does not exclude Bentlage’s “two-step technique” for forming a composite interconnect structure (Ans. 4). Appellant argues that neither Bentlage’s C4 solder bump 37 nor solder bump 38 are, themselves, a composite interconnect structure (Br. 7). Appellant argues that solder bumps 37 and 38 are not formed into solder joint 36 prior to disposing solder joint 36 over nickel layer 60 (Br. 7). Claim 7 recites “forming a composite interconnect structure including a collapsible portion and a non-collapsible portion; and disposing the composite interconnect structure over the interconnect structure over the interconnect site of the trace.” Appellant contends that claim 7 requires that the composite interconnect structure is formed first and then disposed over the interconnect site of the trace. Appellant’s claim construction reads limitations into the claim. Claim 7 does not require separately forming the composite interconnect structure and subsequently disposing the composite interconnect structure over the interconnect site of the trace as argued. Rather, the Examiner reasonably finds that the broadest reasonable interpretation of claim 7 includes Bentlage’s forming a portion of the composite solder (i.e., C4) on the chip 26 and a second portion (i.e., solder bump 38) of the composite solder on the substrate carrier disposed over the copper line trace to form solder joint 36 disposed over the interconnect site of the trace (Bentlage, Figs. 5 and 11). The solder joint 36 composed of solder bump C4 and solder bump 38 is formed and disposed over the interconnect site of the trace. Claim 7 is not as limited as Appellant has argued. 4 Appeal 2017-000873 Application 13/965,356 We affirm the Examiner’s § 102(b) rejection of claim 7. CLAIM 8 Appellant argues that Bentlage does not teach forming an insulating layer including an opening disposed over the interconnect site of the trace (Br. 8). Appellant argues that Bentlage’s encapsulant does not include an opening formed in it above the interconnection site (Br. 8). Appellant contends that one skilled in the art would not consider an encapsulant formed around solder joint 36 with no voids as being an insulating layer including an opening over an interconnect site (Br. 8). The Examiner finds that Bentlage teaches forming an encapsulant around the solder joint 36 (i.e., interconnect structure) (Final Act. 4; Ans. 7; Bentlage Figs. 5, 11). The Examiner finds that the opening in the encapsulant is the open space above the conductive trace where the interconnect structure resides. Id. In other words, the Examiner finds that the solder joint 36 location corresponds to an opening filled by solder and surrounded by encapsulant. Claim 8 does not recite at what point during the method an insulating layer including an opening disposed over the interconnect site over the trace is formed. Accordingly, under the broadest reasonable interpretation of the claim, the opening in the insulating layer may be formed at any point during the method, which may include forming the opening after forming the solder joint 36. In other words, an opening filled with solder over an interconnect site on a trace is not excluded by the claim. 5 Appeal 2017-000873 Application 13/965,356 Moreover, Bentlage teaches that it is known to form a soldermask layer over the circuit lines except for the chip/solder sites (Bentlage, col. 2, 11. 40-41; col. 4,11. 63—64; col. 5,11. 16—19; Fig. 8, ref. no. 56). Bentlage’s soldermask corresponds to an insulating layer that has openings above the chip/solder sites. On this record, we affirm the Examiner’s § 102(b) rejection of claim 8 over Bentlage. CLAIM 14 Appellant argues that Bentlage does not teach an interconnect structure disposed directly on the interconnect site of the trace and including a width greater than a width of the interconnect site of the trace (Br. 9). Appellant contends that Bentlage’s oxidized nickel layer 60 on the surface of the copper trace shows that the solder layer is not disposed directly on the copper circuit lines 24 (Br. 9-10). Appellant further argues that Bentlage does not disclose the width of the solder bump as compared to the width of the trace line (Br. 10). Regarding the § 102(a) rejection over Yeh, Appellant argues that Yeh’s disclosure regarding copper trace 18 is insufficient to anticipate the subject matter of claim 14 (Br. 11). Appellant contends that Yeh does not disclose the width of the trace 18 and contains no disclosure as to an interconnect structure disposed directly on the interconnect site of the trace (Br. 11). The Examiner finds that Bentlage teaches that the solder bump is directly disposed on the interconnect site because no other layer is disposed between the interconnect structure 36 and the interconnect site (Final 6 Appeal 2017-000873 Application 13/965,356 Act. 7). The Examiner also finds that Bentlage in Figure 5 shows that the solder bump 36 is wider than the width of the trace 24 (Final Act. 6). Regarding Yeh, the Examiner finds that Yeh’s Figure 1 shows that the interconnect structure 12 is disposed directly on the interconnect site of the trace 18 and includes a width W greater than the width w of the interconnect site trace 18 (Final Act. 9). The Examiner’s rejections over Bentlage and Yeh are based on the relative size of the solder bump and the trace. The Examiner relies on Bentlage’s and Yeh’s figures to show that the relative dimension of the solder bump is wider than the width of the trace. We are unpersuaded by Appellant’s argument that the figures are insufficient to establish the width of the solder bump as compared to the width of the trace. The Examiner may rely on figures or drawings in a patent that clearly show the structure that is claimed. In re Mraz, 455 F.2d 1069, 1072 (CCPA 1972). In this case, the figures in Bentlage and Yeh clearly show that the relative width of solder bump is wider than the width of the trace. Therefore, the Examiner did not reversibly err in finding that Bentlage and Yeh teach the relative widths of the trace and solder bump. We are unpersuaded by Appellant’s argument that Bentlage’s oxidized layer 60 on the trace prevents the solder bump from being directly disposed on the interconnect site. The Examiner relies on Bentlage’s disclosure regarding Figure 5, which does not include an oxidized layer 60 as in Figure 11 (Ans. 9). Appellant has not shown reversible error with the Examiner’s stated rejection (Final Act. 6-7). Nevertheless, we fail to see how an oxidized nickel layer on the surface of the trace in Bentlage’s Figure 11 would prevent a solder bump 7 Appeal 2017-000873 Application 13/965,356 from being directly disposed on the trace. The oxidized nickel surface on the trace becomes part of the trace. Accordingly, the solder bump 36 is directly formed on the trace that includes the oxidized nickel layer. Claim 14 does not preclude having additional layers be part of the interconnect site of the trace. On this record, we affirm the § 102 rejections of claim 14 over Bentlage and Yeh. CLAIM 21 Appellant argues that Bentlage does not teach a trace formed over the substrate and a composite interconnect structure deformed over an interconnect site of the trace (Br. 12). Appellant contends that Bentlage does not disclose that solder joint 36 is deformed over circuit line 24. Id. Appellant contends that Bentlage teaches thermally reflowing the solder but does not teach mechanically deforming a composite interconnect structure over an interconnect site (Br. 13). The Examiner correctly finds that claim 21 does not limit the type of deformation (Ans. 13). Therefore, Bentlage’s thermal deformation of the solder joint is sufficient to meet the claim. No mechanical deformation is necessary to satisfy the claim language. On this record, we affirm the Examiner’s § 102 rejection of claim 21. For the above reasons, we affirm the Examiner’s following rejections: (1) § 102(b) rejection over Bentlage, (2) § 102(a) rejection over Yeh, (3) § 103(a) rejection over Bentlage in view of Lin, (4) § 103(a) rejection over Yeh in view of Smith, and (5) § 103(a) rejection over Yeh in view of Lin. 8 Appeal 2017-000873 Application 13/965,356 DECISION The Examiner’s decision is affirmed. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(l)(iv). ORDER AFFIRMED 9 Copy with citationCopy as parenthetical citation