Ex Parte Park et alDownload PDFPatent Trial and Appeal BoardNov 14, 201311224313 (P.T.A.B. Nov. 14, 2013) Copy Citation UNITED STATES PATENT AND TRADEMARKOFFICE UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 11/224,313 09/13/2005 Wan-jun Park 2557SI-000339/US 8747 30593 7590 11/14/2013 HARNESS, DICKEY & PIERCE, P.L.C. P.O. BOX 8910 RESTON, VA 20195 EXAMINER FOURSON III, GEORGE R ART UNIT PAPER NUMBER 2823 MAIL DATE DELIVERY MODE 11/14/2013 PAPER Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE ____________ BEFORE THE PATENT TRIAL AND APPEAL BOARD ____________ Ex parte WAN-JUN PARK, BYOUNG-HO CHEONG, EUN-JU BAE, HANS KOSINA, and MAHDI FOURFATH ____________ Appeal 2011-008433 Application 11/224,313 Technology Center 2800 ____________ Before BRADLEY R. GARRIS, PETER F. KRATZ, and MARK NAGUMO, Administrative Patent Judges. GARRIS, Administrative Patent Judge. DECISION ON APPEAL Appellants appeal under 35 U.S.C. § 134 from the Examiner's decision rejecting claims 1-19. We have jurisdiction under 35 U.S.C. § 6. We AFFIRM. Appellants claim a transistor comprising a substrate 40, insulating layer 42, first and second metal layers 46, 48, a nanotube channel 44, insulating layer 50, and at least two gate electrodes 52, 54, "each of the at Appeal 2011-008433 Application 11/224,313 2 least two gate electrodes covering top surfaces and side surfaces of only one of the first and second metal layers" (claim 1, Fig. 3). Appellants also claim a method of manufacturing such a transistor (claims 10 and 19). A copy of representative independent claim 1, taken from the Claims Appendix of the Appeal Brief, appears below. 1. A transistor comprising: a substrate; a first insulating layer formed on the substrate: first and second metal layers formed on the first insulating layer and spaced apart from each other; a nanotube channel formed on the first insulating layer, the first and second metal layers overlapping the nanotube channel; a second insulating layer covering the nanotube channel; and at least two gate electrodes formed on the second insulating layer, the at least two gate electrodes being electrically insulated from each other and each of the at least two gate electrodes covering top surfaces and side surfaces of only one of the first and second metal layers. Under 35 U.S.C. § 103(a), the Examiner rejects independent claims 1, 10, and 19 as unpatentable over Dai et al. (US 2004/0144972 A1, pub. Jul. 29, 2004 (hereafter Dai)) in combination with Nihey (US 2004/0238887 A1, pub. Dec. 2, 2004) and Zhang et al. (US 2004/0036128 A1, pub. Feb. 26, 2004 (hereafter Zhang)) and rejects the remaining dependent claims on appeal as unpatentable over these references alone or in combination with additional prior art. Appellants' arguments are directed to the above quoted claim 1 limitation which is common to each of the independent claims (Br. 13-18). No arguments are specifically directed to the dependent claims on appeal (id.). Therefore, in our assessment of this appeal, we have focused on Appeal 2011-008433 Application 11/224,313 3 representative independent claim 1 with which all other claims 2-19 will stand or fall. We will sustain the above rejections based on the findings of fact, conclusions of law, and rebuttals to arguments which are well expressed by the Examiner in the Answer. The comments below are added for emphasis. The Examiner finds that the two gate electrodes of Dai's transistor do not cover the top and side surfaces of the metal source/drain layers as required by independent claim 1 (Ans. 3-4). Concerning this deficiency, the Examiner finds that Zhang discloses transistors having gate electrodes which overlap source/drain conductors as shown, for example, in Figure 1 (id. at 4). The Examiner recognizes that the gate electrodes shown, for example, in Figure 1 of Zhang are pi-gates (id.) rather than gate electrodes of the type taught by Dai but finds that Zhang discloses using gates other than pi-gates such as double gates, vertical double gates, planar multi-gates and vertical triple gates (id. at sentence bridging 4-5 citing Zhang para. 47). The Examiner finds that Zhang's disclosure of using other gates such as double gates and planar multi-gates encompasses plural gates of the type used by Dai (id. at 5). In light of these findings, the Examiner concludes that it would have been obvious to form the gate electrodes of Dai such that they overlap (i.e., cover the top and side surfaces of) Dai's source/drain conductors in accordance with the teachings of Zhang (id.). Appellants concede that Zhang discloses using gates other than pi- gates but argues "this one generic sentence fails to provide the requisite teaching and motivation sought by the Examiner" (Br. 16). According to Appeal 2011-008433 Application 11/224,313 4 Appellants, "it is not even clear what arrangement is intended by Zhang’s cursory reference to the '[o]ther types of gates' including 'double gates,' 'triple gates,' and 'quadruple gates,' [citing Zhang para. 47]" (id.). Appellants' argument lacks convincing merit. We agree with the Examiner that Zhang's disclosure of other gates would have been understood by one having ordinary skill in this art as including the plural gates disclosed by Dai in Fig. 4c to enable a logical OR gate (Ans. 6; cf., Br. 16). More specifically, we agree with the Examiner's finding that the plain meanings of the terms used by Zhang in describing these other gates encompass multiple local gate electrodes of the type taught by Dai (id. at 7). It is appropriate to emphasize that Appellants do not contest this latter finding (i.e., no Reply Brief has been filed). On this record, Appellants unsubstantiated arguments do not identify reversible error in the Examiner’s determinations that one of ordinary skill in the art would have found the overlapping arrangement of the gate electrodes with respect to the source/drain conductors as depicted in Figure 1 of Zhang (with pi-gates) as being applicable to the formation of the other types of gates disclosed by Zhang and, correspondingly, that one of ordinary skill in the art would have been led to employ such an overlapping gate arrangement as an obvious alternative for arranging the plural gates of Dai (id. 6-7). The decision of the Examiner is affirmed. Appeal 2011-008433 Application 11/224,313 5 No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a). AFFIRMED cam Copy with citationCopy as parenthetical citation