Ex Parte LeeDownload PDFBoard of Patent Appeals and InterferencesAug 23, 200610254326 (B.P.A.I. Aug. 23, 2006) Copy Citation - 1 - The opinion in support of the decision being entered today was not written for publication and is not binding precedent of the Board ___________ UNITED STATES PATENT AND TRADEMARK OFFICE ___________ BEFORE THE BOARD OF PATENT APPEALS AND INTERFERENCES ___________ Ex parte THOMAS H. LEE ___________ Appeal No. 2006-1545 Application 10/254,3261 ___________ ON BRIEF ___________ Before HAIRSTON, JERRY SMITH, and BARRETT, Administrative Patent Judges. BARRETT, Administrative Patent Judge. DECISION ON APPEAL This is a decision on appeal under 35 U.S.C. § 134(a) from the final rejection of claims 42-56. We reverse. BACKGROUND The invention relates to a steering element (a PN diode) and a state change element (a dielectric rupture antifuse) electrically connected between two conductors forming a nonvolatile memory cell. The steering element is a 1 Application for patent filed September 25, 2002, entitled "Diverse Band Gap Energy Level Semiconductor Device," which is a division of Application 10/077,108, filed February 15, 2002. Appeal No. 2006-1545 Application 10/254,326 - 2 - heterojunction PN diode formed from two semiconductor materials having different band gap energy levels, which increases the forward-to-reverse current ratio. Claim 42 is reproduced below. 42. A semiconductor structure comprising: a first conductor and a second conductor; a steering element in circuit communication with the first conductor and comprising at least first and second semiconductor materials, the first semiconductor material having a first band gap energy level, the second semiconductor in electrical communication with the first semiconductor and having a second band gap energy level, wherein the second band gap energy level is different from the first band gap energy level; and a state change element in circuit communication with the steering element and the second conductor and comprising a selectable high impedance state and a selectable low impedance state. Appeal No. 2006-1545 Application 10/254,326 - 3 - THE REFERENCES The examiner relies on the following references: Fang et al. (Fang) 5,670,414 September 23, 1997 Zhang 5,835,396 November 10, 1998 Shimogaki et al. JP 10079521 March 24, 1998 (Shimogaki) THE REJECTIONS Claims 42-46, 53, and 56 stand rejected under 35 U.S.C. § 103(a) as being unpatentable over Zhang and Shimogaki. The examiner finds that Zhang discloses a memory device with first and second conductors; a steering element with first and second semiconductor layers forming a PN diode; and an antifuse. The examiner finds that Zhang does not disclose the semiconductor layers forming the PN diode having different band gap energy levels, but that Shimogaki discloses that a heterojunction PN diode shows enhanced rectification characteristics. The examiner concludes that it would have been obvious to use the heterojunction diode of Shimogaki in Zhang to enhance operation. Claims 47-52, 54, and 55 stand rejected under 35 U.S.C. § 103(a) as being unpatentable over Zhang and Fang. Since these claims depend directly or indirectly from claim 42, we assume the rejection is over Zhang, Shimogaki, and Fang. We refer to the final rejection and the examiner's answer (pages referred to as "EA__") for a statement of the examiner's Appeal No. 2006-1545 Application 10/254,326 - 4 - rejection, and to the brief (pages referred to as "Br__") and reply brief (pages referred to as "RBr__") for a statement of appellant's arguments thereagainst. DISCUSSION The rejection and arguments based on the rejection of Zhang and Shimogaki are almost identical to those in the previous Board decision in Ex parte Lee, Appeal No. 2005-0723, Application 10/254,123, entered August 30, 2005. We incorporate the reasoning of that decision by reference. We found in that opinion that Shimogaki discloses a diamond lone particle grown in contact with an N-type silicon substrate to form a heterojunction diode, which teaches that the diode is formed of two single- crystal materials. We agreed with appellant that one skilled in the art would not have been motivated to substitute the diode formed of single crystals in Shimogaki for the diode formed of polycrystalline or amorphous semiconductors in Zhang because the differences in behavior, properties, compatibility, and manufacturing techniques argue against the successful combination. That is, the examiner has picked a diode implementation in Shimogaki that is not capable of being physically combined with or substituted into Zhang, based on the fact that it is a heterojunction diode as needed in the claims. This evidences a lack of motivation to combine. The claims do Appeal No. 2006-1545 Application 10/254,326 - 5 - not require that first and second semiconductor materials are polycrystalline or amorphous (Br9 n.1), but the materials must form a heterojunction device and must be joined to first and second conductors and a state change element. We look at the examiner's arguments that deal with the physical combinability of Zhang and Shimogaki. The examiner states (EA4-5): First, note that the rejection shows that Zhang is modified by Shimogaki et al. and that modified device would include a polycrystalline heterojunction device. Note that Zhang shows a method of forming the structure which depends on forming the poly material in holes. However, there is an extensive literature and a large number of patents that show that polycrystalline silicon can be formed into essentially single crystal structure using catalysts and laser annealing. [T]he process involves forming an amorphous silicon layer, depositing a catalytic element, heat treating to crystallize and then laser annealing the structure to form near perfect single crystal material. Thus it is well within the state of the art to turn the Zhang devices into single crystal devices. That is, the examiner says that the proposed modification of Zhang by Shimogaki includes a polycrystalline heterojunction device even though Shimogaki is not a polycrystalline device. The examiner then states that it was known how to turn the Zhang polycrystalline devices into single crystal devices, evidently to be compatible with Shimogaki. Appellant argues that the examiner has not cited any art teaching the techniques, the techniques are not cited in either reference, and no one could be certain of their success (RBr3). Appeal No. 2006-1545 Application 10/254,326 - 6 - It is argued that the formation of such a device is not obvious from the cited references because nothing in Zhang teaches or suggests the utility or desirability of the use of catalytic or laser annealing techniques, or the need to increase the grain size in the polycrystalline diode of Zhang by any means (RBr3). It is argued that these techniques are not taught in Shimogaki, which uses epitaxial growth that is impossible in Zhang (RBr4). "Appellants respectfully maintain that the mere existence of techniques does not render obvious their use in an unrelated context." (RBr4). We agree with appellant that there is no suggestion in the references to modify Zhang as proposed by the examiner. The possibility that Zhang could be modified to provide a single crystal device using techniques that are not taught or suggested in either of the references is mere speculation, which is insufficient to support an obviousness conclusion. We cannot uphold an obviousness determination based on evidence that is not of record and not applied in the rejection. The examiner states that it was well known in the art that the Zhang process could be easily modified to provide a monocrystalline device (EA6, three places). Again, there is no evidence cited for this finding and nothing in Zhang suggests that it should be done. Appeal No. 2006-1545 Application 10/254,326 - 7 - The examiner states that "it is not necessary that a monocrystalline device be formed since the benefits shown by Shimogaki et al. only require the relative bandgaps" (EA6) and there is no reason why heterojunction devices cannot be polycrystalline (EA6, two places). Appellant replies "that the Examiner is here suggesting that it would have been obvious to take a single aspect of Shimogaki et al. (that of using different semiconductor materials having different band gap energies) in isolation from, and even in contradiction of, all of the other teachings of Shimogaki et al., then apply such teaching to the array of Zhang" (RBr5). It is argued that the teachings of the heterojunction art cited by appellant attest to the importance of the use of monocrystalline materials and lattice matching in conventional heterojunction diodes and appellant has not been able to find any teaching that the heterojunction diodes of Shimogaki could as easily be polycrystalline as monocrystalline (RBr5-6). Basically, the examiner has not produced any evidence of a heterojunction PN device made from polycrystalline material that could be substituted for the PN device in Zhang. Merely saying that it would be obvious to substitute a heterojunction PN device for the PN device in Zhang for the increased efficiency does not show how such a device would be made. Since appellant does not disclose how a heterojunction diode would be made using Appeal No. 2006-1545 Application 10/254,326 - 8 - polycrystalline or amorphous material, it is assumed that the technique is within the level of ordinary skill in the art. However, where, as here, appellant is arguing that conventional heterojunction devices are lattice matched single crystals, and "[t]he polycrystalline heterojunction diode the Examiner imagines is not taught in either reference, or in any reference of record, and is not conventional" (Br9), some evidence is required. The examiner also has not provided any evidence that the claimed combination with the heterojunction diode could be made using single crystals, and there is no suggestion in Zhang that it would have been desirable to use single crystals. We conclude that the examiner has failed to establish a prima facie case of obviousness. The rejection of claims 42-46, 53, and 56 is reversed. Fang does not cure the deficiencies of Zhang and Shimogaki and, therefore, the rejection of claims 47-52, 54, and 55 is also reversed. Appeal No. 2006-1545 Application 10/254,326 - 9 - REVERSED KENNETH W. HAIRSTON ) Administrative Patent Judge ) ) ) ) ) BOARD OF PATENT JERRY SMITH ) APPEALS Administrative Patent Judge ) AND ) INTERFERENCES ) ) ) LEE E. BARRETT ) Administrative Patent Judge ) Appeal No. 2006-1545 Application 10/254,326 - 10 - Matrix Semiconductor, Inc. 3230 Scott Blvd. Santa Clara, CA 95054 Copy with citationCopy as parenthetical citation