Ex Parte Laermer et alDownload PDFPatent Trial and Appeal BoardAug 31, 201714446066 (P.T.A.B. Aug. 31, 2017) Copy Citation United States Patent and Trademark Office UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O.Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 14/446,066 07/29/2014 Franz LAERMER BOSC.P8919US/11603971 3223 24972 7590 09/05/2017 NORTON ROSE FULBRIGHT US LLP 1301 Avenue of the Americas NEW YORK, NY 10019-6022 EXAMINER KIELIN, ERIK J ART UNIT PAPER NUMBER 2814 NOTIFICATION DATE DELIVERY MODE 09/05/2017 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): nyipdocket@nortonrosefulbright.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte FRANZ LAERMER,1 Ricardo Ehrenpfordt, Jochen Zoellin, Bill Scott, and Jeff Berryman Appeal 2017-001088 Application 14/446,066 Technology Center 2800 Before MARK NAGUMO, DONNA M. PRAISS, and DEBRA L. DENNETT, Administrative Patent Judges. NAGUMO, Administrative Patent Judge. DECISION ON APPEAL Franz Laermer, Ricardo Ehrenpfordt, Jochen Zoellin, Bill Scott, and Jeff Berryman (“Laermer”) timely appeal under 35 U.S.C. § 134(a) from the Final Rejection2 of claims 2, 4, 9 and 16—18.3 We have jurisdiction. 35 U.S.C. § 6. We affirm. 1 The real party in interest is identified as Robert Bosch GmbH. (Appeal Brief, filed 7 June 2016 (“Br”), 1.) 2 Office Action mailed 7 December 2015 (“Final Rejection”; cited as “FR”). 3 Remaining copending claims 1, 3, 5, 13, and 14 have been withdrawn from consideration by the Examiner, and are not before us. Appeal 2017-001088 Application 14/446,066 OPINION A. Introduction4 The subject matter on appeal relates to capacitive MEMS (“microelectromechanical systems”) microphones. In such microphones, sound pressure causes the deflection of a diaphragm fitted with a deflectable electrode which is paired with a largely rigid counter-electrode on the acoustically permeable counter-element of the microphone structure. (Spec. 1,11. 16—21.) The deflection causes a change in the capacitance of the structure, which may be detected in standard ways as a change in voltage. {Id. at 11. 21—26.) Despite the extreme sensitivity, low-noise, and temperature-stable characteristics of such microphones, they are said to suffer from a nonlinear diaphragm deflection in response to sound pressure, leading to harmonic overtones in the measured acoustic spectrum and intermodulation effects that degrade the performance of the microphone. {Id. at 2,11. 4—23.) The inventors seek patent protection for a microphone assembly in which a pair of identical MEMS microphones are “mounted in such a way that under the action of sound the spacing between the diaphragm and the counter-element of the two microphone structures changes in opposite directions.” {Id. at 3,11. 1 4.) As a result, the signals from the two microphones are out of phase with one another by 180°. {Id. at 11. 10—12.) 4 Application 14/446,066, Microphone assembly having at least two MEMS microphone components, filed 29 July 2014, claiming the benefit of an application filed in Germany on 30 July 2013. We refer to the “’066 Specification,” which we cite as “Spec.” 2 Appeal 2017-001088 Application 14/446,066 The useful signal from the microphones is said to be in the first harmonic oscillation, and the useful signal from one microphone is said to have the opposite sign of the useful signal from the other microphone. {Id. at 11. 12— 15.) The unwanted non-linear portions of the signal are said to have the same sign, despite the phase shift. {Id. at 11. 15—17.) As a result, according to the ’066 Specification, the non-linear signals can be subtracted and eliminated or significantly reduced, while the useful signal can be doubled, or at least significantly amplified. (Id. at 11. 17—21.) A preferred embodiment is illustrated in Figure 1, shown below. (Figure 1: microphone assembly 100[5] with MEMS components 10 and 20} 5 Throughout this Opinion, for clarity, labels to elements are presented in bold font, regardless of their presentation in the original document. 3 Appeal 2017-001088 Application 14/446,066 MEMS component 10 comprises diaphragm 12, bearing an electrode (not shown), and opposed stationary acoustically permeable counter element 13, bearing a complementary electrode (also not shown), which together form a capacitor. MEMS component 10 is mounted on substrate 11 over opening 14. (Spec. 7,1. 33, to 8,1. 15.) MEMS component 20 is similarly mounted on substrate 21 over opening 24. {Id. at 8,11. 16—17.) The mounted MEMS components are mounted on bearer 31 over through- opening 32. {Id. at 11. 18—20.) Bearer 31 is a circuit board that may have ASIC (“Application Specific Integrated Circuit”) components for processing the signals from the MEMS capacitors {id. at 9,11. 17—20, and is connected to MEMS components 10 and 20 by wires 35 {id. at 11. 13—16). Sole independent claim 18 is representative and reads: A microphone assembly, comprising: at least one first MEMS component [10] and at least one second MEMS component [20], each including at least one micromechanical microphone structure; wherein: each microphone structure includes (i) a diaphragm configured to be deflected by sound pressure and provided with at least one diaphragm electrode of a capacitor system, and (ii) a stationary acoustically permeable counter-element acting as a bearer for at least one counter-electrode of the capacitor system; the two MEMS components are (i) arranged such that, under the influence of the sound pressure, the respective spacing between the diaphragm and the counter-element of the two microphone structures changes in opposite directions, and (ii) each mounted separately upon a respective substrate [11, 21] via which the two MEMS components are attached to a bearer [31]; 4 Appeal 2017-001088 Application 14/446,066 the bearer [31] is a circuit board that is positioned between the two substrates [11,21] and between the two MEMS components [10, 20]; and the two MEMS components [10, 20], the two substrates [11, 21], and the bearer [31] together enclose a space [14, 24] that is only acoustically permeable through the two stationary acoustically permeable counter-elements. (Claims App., Br. 7 (not numbered); some indentation, paragraphing, bracketed labels, and emphasis added.) The Examiner maintains the following grounds of rejection6,7: A. Claims 2, 4, and 16—18 stand rejected under 35 U.S.C. § 103 in view of the combined teachings of Reining8 and Sato.9 A1. Claims 2, 4, 9, and 16—18 stand rejected under 35 U.S.C. § 103 in view of the combined teachings of Reining, Sato, and Ryan.10 6 Examiner’s Answer mailed 12 August 2016 (“Ans.”). 7 Because this application was filed after the 16 March 2013, effective date of the America Invents Act, we refer to the AIA version of the statute. 8 Friedrich Reining, Microphone, WO 2012/001589 A2 (2012). 9 Akiyoshi Sato, Condenser Microphone, U.S. Patent Application Publication 2008/0192963 A1 (2008). 10 William Ryan and Anthony Minervini, Microphone having reduced vibration sensitivity, U.S. Patent Application Publication 2010/0303274 A1 (2010). 5 Appeal 2017-001088 Application 14/446,066 B. Discussion The Board’s findings of fact throughout this Opinion are supported by a preponderance of the evidence of record. We find initially that Laermer does not present arguments for the separate patentability of any claim apart from claim 18. All claims therefore stand or fall with claim 18. 37 C.F.R. § 41.37(c)(l)(iv) (2015). Laermer urges the Examiner erred harmfully in finding that Reining discloses a microphone assembly in which “the two MEMS components, the two substrates, and the bearer together enclose a space.” Rather, in Laermer’s words, “Figs. 3 and 4 of Reining clearly show that the bearer 50 is positioned between the two substrates 14a, 14b, but not between the two MEMS components 10a, 10b; in fact, the bearer 50 surrounds the two MEMS components 10a, 10b.” (Br. 3,11. 19—22.) An annotated version of Reining Figure 3 is shown below. 13b 10b r\ * 12b 32/ - * ; —4n»—r ■ ITTTfi'f« ,rririTfi 13b ./ I tok l 1 V. 12a 30 (Reining Figure 3 shows a MEMS capacitive microphone assembly (annotation added)} 6 Appeal 2017-001088 Application 14/446,066 Laermer urges further that “the space enclosed on two sides by the two MEMS components 10a, 10b is, at most, also enclosed by the bearer 50, but is not in [sic] enclosed by the substrates 14a, 14b.” {Id. at 11. 27—29, citing Reining 7,11. 21—23.) The cited passage in Reining reads, “[t]he two semiconductor dies are bonded together using a laminate structure 50 which carries connection lines to the membrane and back electrode contacts.” (Reining 7,11. 21—23.) In the Examiner’s words, “Reining’s Figs. 3 and 4 show that membranes, 12a and 12b, as well as the counter-electrodes, 13a and 13b, do not extend all of the way to the bearer 50 thereby requiring the substrate surfaces to participate in enclosing the spaced (Ans. 13,11. 19—22.) As shown in annotated Figure 3, the contacts between the MEMS, the substrate, and the bearer (which Reining, in the passage just quoted, identifies as a circuit board) and the enclosed space are indicated by the added arrows and text-boxes. Laermer does not direct our attention to a definition of the term “between” in the Specification—and our review has not revealed one to us— that would exclude the walls of bearer 50 from being “positioned between the two substrates and between the two MEMS components” as required by claim 18. We are thus not persuaded of harmful error in the Examiner’s findings in this regard. The Examiner finds that the only difference between the microphone assembly disclosed by Reining and the claimed assembly is that the “stationary acoustically permeable counter elements” are facing inward to the space in Reining’s Figure 3 (13a, 13b), and, therefore, the final limitation, that the enclosed space is “only acoustically permeable through 7 Appeal 2017-001088 Application 14/446,066 the two stationary acoustically permeable counter-elements,” is not met.11 (FR, para, bridging 4—5.) The Examiner finds that Sato discloses, in Figures 11 and 17 (not reproduced here), similar capacitive MEMS microphone assemblies that have similar MEMS components in which the acoustically permeable counter-elements are directed outwards in the case of Figure 11, and inwards in the case of Figure 17. (FR 5.) The Examiner reasons that because either configuration can be used in a microphone assembly, the routineer would have had a reasonable expectation of successfully inverting Reining’s components “such that the backside of each of the substrates 14a, 14b are attached to bearer 50, thereby yielding the same closed space as that shown in Sato’s Fig. 11, wherein the count-element 13a, 13b are arranged outside of the diaphragms 12a, 12b.” {Id. at 5,11. 13—16.) Laermer does not address Sato in the principal Brief on Appeal, perhaps believing that, in an interview, “the Examiner acknowledged that the rejection relies on the addition of Ryan.”12 (Br. 3,11. 5—9.) Laermer’s 11 The term “acoustically permeable” does not appear to be defined, formally, in the Specification. The acoustically permeable counter-element is depicted as having holes in it, so the sound can travel through the same medium (i.e., typically the atmosphere) from the source to the diaphragms, and both the Examiner and Appellants appear to have adopted this meaning. For purposes of this appeal, we follow, without deciding, this interpretation. We note, however, that sounds are transmitted through many solids (e.g., stethoscope diaphragms, window panes) often with only minor attenuation. We leave to the sound discretion of the Examiner and Laermer the determination, in the event of further examination, of whether further exploration of this point is likely to be useful. 12 The Examiner held an “Applicant-initiated interview” with counsel for Laermer on 29 February 2016, which is memorialized in the Interview 8 Appeal 2017-001088 Application 14/446,066 criticisms of the Examiner’s reliance on Ryan, however, assume that the inversion suggested by the Examiner would necessarily result in the attachment of the two substrates 14a, 14b to each other, rather than to circuit board 50. {Id. at 4, 1st full para.) We find no persuasive merit in this argument, as the Examiner’s reason to include Ryan was to provide an example of a bearer, identified by the Examiner as spacer layer 302, or substrate layers 304 or 306, in a MEMS microphone. While the structure presented in the Brief at page 4 bears a familial resemblance to the structure illustrated in ’066 Specification Figure 3a, which is not within the scope of claim 18, the Examiner’s reasoning that the two orientations taught by Sato would have suggested corresponding orientations of the MEMS elements in Reining has not been challenged substantively. Laermer urges further, however, that the inverted configuration would have been understood as being contrary to the teachings of Reining, because the two microphones would be placed “at a significant distance apart, and, Summary mailed 3 March 2016. While somewhat terse, as are most interview summaries, we find no indication that the Examiner abandoned the rejection based solely on the combined teachings of Reining and Sato alone. Had Laermer wanted to make this point clear, a written communication could have been filed, memorializing Laermer’s understanding of the results of the interview. See 37 C.F.R. § 1.2, “All business with the Patent and Trademark Office should be transacted in writing. . . . The action of the Patent and Trademark Office will be based exclusively on the written record in the Office. No attention will be paid to any alleged oral promise, stipulation, or understanding in relation to which there is disagreement or doubt.” See also the Applicant recordation instruction on the Interview Summary, inviting a statement of the substance of the interview within one month of the mailing of the Summary. 9 Appeal 2017-001088 Application 14/446,066 significantly, one of the membranes would then be at a significant distance from the shared sound inlet.” (Br. 4, last para., emphasis added.) We do not find this argument persuasive of harmful error. First, Laermer provides us with no evidence regarding what distance would be significant. We decline to accord weight to argument unsupported by evidence of record. In particular, as long as the wavelength of the sound is much longer than the distance between diaphragms 12, each will experience approximately the same disturbance (assuming the diaphragms themselves do not significantly alter the sound wave). Laermer has not explained why these microelectromechanical devices would have been expected to have dimensions so large that distances between paired MEMS components would be a “significant” fraction of the wavelength of sound. In conclusion, we are not persuaded of harmful error in the appealed rejections. C. Order It is ORDERED that the rejection of claims 2, 4, 9, and 16—18 is affirmed. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a). AFFIRMED 10 Copy with citationCopy as parenthetical citation