Ex Parte KomadaDownload PDFPatent Trial and Appeal BoardMar 10, 201412073215 (P.T.A.B. Mar. 10, 2014) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE _________ BEFORE THE PATENT TRIAL AND APPEAL BOARD __________ Ex parte SATOSHI KOMADA __________ Appeal 2011-009218 Application 12/073,215 Technology Center 2800 ___________ Before ADRIENE LEPIANE HANLON, CATHERINE Q. TIMM, and JAMES C. HOUSEL, Administrative Patent Judges. HANLON, Administrative Patent Judge. DECISION ON APPEAL Appeal 2011-009218 Application 12/073,215 2 A. STATEMENT OF THE CASE The Appellant appeals under 35 U.S.C. § 134 from the final rejection of claims 1-6. We have jurisdiction under 35 U.S.C. § 6(b). We AFFIRM. Claims 1, 2, and 6 are representative of the subject matter on appeal and are reproduced below from the Claims Appendix of the Appeal Brief dated August 6, 2010 (“App. Br.”). 1. A nitride semiconductor light emitting device comprising: a substrate; a first n-type nitride semiconductor layer; a light emitting layer; a p-type nitride semiconductor layer; a p-type nitride semiconductor tunnel junction layer; an n-type nitride semiconductor tunnel junction layer; and a second n-type semiconductor layer; formed on the substrate in this order; wherein said p-type nitride semiconductor tunnel junction layer contacts said n-type nitride semiconductor tunnel junction layer to form a tunnel junction, said p-type nitride semiconductor tunnel junction layer and said n-type nitride semiconductor tunnel junction layer contain In, said p-type nitride semiconductor tunnel junction layer contacts said p-type nitride semiconductor layer, said p-type nitride semiconductor layer having a larger band gap energy than said p-type nitride semiconductor tunnel junction layer, and Appeal 2011-009218 Application 12/073,215 3 said n-type nitride semiconductor tunnel junction layer contacts said second n-type nitride semiconductor layer, said second n-type nitride semiconductor layer having a larger band gap energy than said n-type nitride semiconductor tunnel junction layer, a shortest distance between an interface of said p-type nitride semiconductor tunnel junction layer and said p-type nitride semiconductor layer and an interface of said p-type nitride semiconductor tunnel junction layer and said n-type nitride semiconductor tunnel junction layer is greater than 2 nm but less than 10 nm, a shortest distance between an interface of said n-type nitride semiconductor tunnel junction layer and said second n- type nitride semiconductor layer and an interface of said p-type nitride semiconductor tunnel junction layer and said n-type nitride semiconductor tunnel junction layer is less than 40 nm. 2. The nitride semiconductor light emitting device according to Claim 1, wherein the ratio of the number of In atoms to the total number of Al, Ga, and In atoms in said p-type nitride semiconductor tunnel junction layer is larger than 0.1. 6. The nitride semiconductor light emitting device according to Claim 1, wherein the ratio of the number of In atoms to the total number of Al, Ga, and In atoms in said n-type nitride semiconductor tunnel junction layer is larger than 0.1. Claims 1-6 stand rejected under 35 U.S.C. § 103(a) as unpatentable over Kneissl.1 B. DISCUSSION 1. Claim 1 1 US 2003/0116767 A1, published June 26, 2003. App App nitrid inven erred semi inter eal 2011-0 lication 12 Appellan e semicon tion. Spe A The disp in conclu conductor a nitride s nitride s nitride s nitride s nm but l In the co pret this li 09218 /073,215 t’s FIG. 1 ductor lig c. 5, ll. 12 ppellant’s ositive iss ding that t light emit shortest di emiconduc emiconduc emiconduc emiconduc ess than 10 ntext of th mitation a , reproduc ht emitting -14. FIG. 1 dep light em ue as to cl he teachin ting devic stance betw tor tunnel tor layer [ tor tunnel tor tunnel nm. e embodim s reciting t 4 ed below, device ac icts a nitr itting dev aim 1 is w gs of Knei e comprisi een an in junction l 4] and an junction l junction l ent illust hat the thi illustrates cording to ide semico ice. hether the ssl render ng the foll terface of ayer [5] an interface o ayer [5] an ayer [6] is rated in Ap ckness of t an examp the prese nductor Examiner obvious a owing lim said p-typ d said p-ty f said p-ty d said n-ty greater th pellant’s he p-type le of a nt reversibly nitride itation: e pe pe pe an 2 FIG. 1, we nitride Appeal 2011-009218 Application 12/073,215 5 semiconductor tunnel junction layer (5) is greater than 2 nm but less than 10 nm. The Examiner finds: Kneissl discloses a shortest distance between an interface of said p-type nitride semiconductor tunnel junction layer 216 and said p-type nitride semiconductor layer 214 and an interface of said p-type nitride semiconductor tunnel junction layer 216 and said n-type nitride semiconductor tunnel junction layer 218 is typically around 20nm [0039-0040]. Ans. 5. More specifically, Kneissl discloses that the thickness of the p-type nitride semiconductor tunnel junction layer 216 “has a thickness between 10 nm and 100 nm and typically around 20 nm.” Kneissl, para. [0039]. The Examiner concludes that it would have been obvious to one of ordinary skill in the art to decrease this thickness to a value within the claimed range “in order to reduce the operating voltage.” Ans. 5. The Appellant argues: Kneissl neither discloses nor suggests reducing the operating voltage by reducing the thickness of the tunnel junction layer 216. Rather, Kneissl explicitly teaches that a “lower bandgap Egap of the InGaN layer” and a “larger total electric field across the tunnel junction would reduce the operating voltage”. . . . App. Br. 12. Kneissl discloses: [T]he first part of the tunnel junction can be formed from highly p-type doped InGaN:Mg or InGaAlN:Mg. The tunnel probability increases exponentially with decreasing tunnel junction bandgap [~exp(-Egap1.5)] and therefore the lower Appeal 2011-009218 Application 12/073,215 6 bandgap Egap of the InGaN layer would reduce the operating voltage. In addition, the large polarization fields present in pseudomorphicaly strained InGaN films would add to the built- in field of the pn-junction and consequently increase the total electric field across the tunnel junction. As the tunnel probability increases exponentially with increasing tunnel junction field F [~exp(-1/F)], the larger total electric field across the tunnel junction would reduce the operating voltage. Kneissl, para. [0039] (emphasis added). Relying on an article by T. Gessmann, et al.,2 the Examiner finds that tunneling probability also increases exponentially upon decreasing layer thickness. Ans. 8-9. Thus, the Examiner finds the motivation provided for decreasing the tunnel layer thickness in Kneissl (i.e., to reduce the operating voltage) is not based on impermissible hindsight but rather is supported by the evidence of record. Ans. 9. The Appellant does not offer a response. Moreover, relying on In re Aller, 220 F.2d 454, 456 (CCPA 1955), the Examiner points out that “where the general conditions of a claim are disclosed in the prior art, discovering the optimum or workable ranges involves only routine skill in the art.” Ans. 5. In this regard, we find Kneissl expressly discloses a thickness range “between 10 nm and 100 nm” and would have taught one of ordinary skill in the art that a thickness at the lower end of this range, e.g., 10.1 nm, would have been workable in Kneissl’s device. See Kneissl, para. [0039]. As stated in In re Peterson, 315 F.3d 1325, 1329 (Fed. Cir. 2003): 2 T. Gessmann, et al., Ohmic contacts to p-type GaN mediated by polarization fields in thin InxGa1-xN capping layers, 80 APPLIED PHYSICS LETTERS 986, 988 (2002). Appeal 2011-009218 Application 12/073,215 7 [A] prima facie case of obviousness exists when the claimed range and the prior art range do not overlap but are close enough such that one skilled in the art would have expected them to have the same properties. Titanium Metals Corp. v. Banner, 778 F.2d 775, 783 (Fed. Cir. 1985). We find that the lower limit of Kneissl’s range and the upper limit of the claimed range (i.e., “less than 10 nm”) are close enough that one of ordinary skill in the art would have expected the claimed p-type nitride semiconductor tunnel junction layer (5) and the p-type nitride semiconductor tunnel junction layer disclosed in Kneissl (216) to have the same properties. The Appellant has failed to establish reversible error in the Examiner’s conclusion of obviousness. Therefore, the § 103(a) rejection of claims 1 and 3-5 is sustained.3 2. Claims 2 and 6 The Examiner finds Kneissl discloses that the ratio of the number of In atoms to the total number of Al, Ga, and In atoms in the p- and n-type nitride semiconductor tunnel junction layers is larger than 0.1 as recited in claims 2 and 6, respectively. Ans. 6, 7. For support, the Examiner relies on paragraph [0039] and Kneissl FIG. 3. Ans. 6, 7. Relying on paragraph [0029] of Kneissl, the Appellant argues “Kneissl explicitly states that the In mole fraction of FIG. 3 is merely with regard to a ‘InGaN’ film (and not a film that includes Al).” App. Br. 16, 17. 3 The Appellant does not present separate arguments in support of the patentability of dependent claims 3-5. Therefore, claims 3-5 stand or fall with the patentability of claim 1. 37 C.F.R. § 41.37(c)(1)(vii). Appeal 2011-009218 Application 12/073,215 8 Kneissl discloses that “FIG. 3 is a graph of the strength of the piezoelectric field versus the indium content in InGaN layers in the nitride semiconductor laser structure with a p-n tunnel junction of FIG. 2.” Kneissl, para. [0029]. The Examiner recognizes as much. However, the Examiner finds Kneissl discloses that InGaAlN layers are an alternative to the InGaN layers referred to by the Appellant and would have also been expected to have a ratio within the range recited in claims 2 and 6. Ans. 10, 11. The Appellant does not offer a response. The Appellant has failed to establish reversible error in the Examiner’s conclusion of obviousness. Therefore, the § 103(a) rejection of claims 2 and 6 is sustained. C. DECISION The decision of the Examiner is affirmed. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(1). AFFIRMED cdc Copy with citationCopy as parenthetical citation