Ex Parte Duerig et alDownload PDFPatent Trial and Appeal BoardSep 28, 201612940079 (P.T.A.B. Sep. 28, 2016) Copy Citation UNITED STA TES p A TENT AND TRADEMARK OFFICE APPLICATION NO. FILING DATE 12/940,079 11/05/2010 49267 7590 09/30/2016 TUTUNJIAN & BITETTO, P.C. 401 Broadhollow Road, Suite 402 Melville, NY 11747 FIRST NAMED INVENTOR Urs T. Duerig UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www .uspto.gov ATTORNEY DOCKET NO. CH9200900l7US1 (163-517) CONFIRMATION NO. 6723 EXAMINER MCCORMACK, JASON L ART UNIT PAPER NUMBER 2881 NOTIFICATION DATE DELIVERY MODE 09/30/2016 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address( es): patents@tb-iplaw.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte URS T. DUERIG, BERND W. GOTSMANN, ARMIN W. KNOLL, and MARK ALFRED LANTZ Appeal2014-001647 Application 12/940,079 Technology Center 2800 Before DEBRA K. STEPHENS, WILLIAM M. FINK, and SHARON PENICK, Administrative Patent Judges. FINK, Administrative Patent Judge. DECISION ON APPEAL A. "1"1 • 1 "1 • "1 ,..,, ,- TT #'I ~ n "I""" Al/ '- I"" ,"1 Appeuants' seeK our review unaer j) u.~.L. s U4~aJ or me Examiner's final rejection of claims 1-18. We have jurisdiction under 35 U.S.C. § 6(b). We affirm. 1 The real party in interest is identified as International Business Machines Corporation. Br. 1. Appeal2014-001647 Application 12/940,079 STATEMENT OF THE CASE Appellants' invention relates to methods for scanning and imaging the surface of a material using a physical probe in a scanning probe microscope (SPM). Spec. ,-i,-i 2-3.2 Claims 1, 15, and 18 are the independent claims on appeal. Claim 1 is illustrative of Appellants' invention and is reproduced below with the disputed limitation emphasized: 1. A method for scanning a surface of a material with a scanning probe microscope (SPM), said SPM having a cantilever sensor configured to exhibit both a first spring behavior and a second, stiffer spring behavior, the method comprising: operating said SPM in contact mode, whereby said sensor is scanned on said material surface and said first spring behavior is excited by a deflection of said sensor by said material surface; and exciting by excitation means said second, stiffer spring behavior at a resonance frequency thereof, to modulate an interaction of said sensor and said material surface. Br. 25 (emphasis added). Claims 1--4, 12, 13, and 15-17 stand rejected under 35 U.S.C. § 102(b) as anticipated by Su '388 (US 2006/0260388 Al; Nov. 23, 2006). Claims 8-11 and 14 stand rejected under 35 U.S.C. § 103(a) as being unpatentable in view of Su '388. 2 Our decision refers to Appellants' Appeal Brief filed August 16, 2013 ("Br."); the Examiner's Answer mailed September 11, 2013 ("Ans."); the Final Office Action mailed March 25, 2013 ("Final Act."); and the original Specification filed November 5, 2010 ("Spec."). 2 Appeal2014-001647 Application 12/940,079 Claims 5 and 6 stand rejected under 35 U.S.C. § 103(a) as being unpatentable in view of Su '388 and Su '099 (US 6,945,099B1; Sept. 20, 2005). Claims 7 and 18 stand rejected under 35 U.S.C. § 103(a) as being unpatentable in view of Su '388 and Duerig (US 2008/0316904 Al; Dec. 25, 2008). Based on Appellants' arguments, the issues on appeal are ( 1) whether Su '388 discloses "operating said SPM in contact mode, whereby said sensor is scanned on said material surface and said first spring behavior is excited by a deflection of said sensor by said material surface," as recited in independent claim 1, and (2) whether the "Q factor" limitation of dependent claim 8 would have been obvious over Su '388. ANALYSIS Claims 1-7, 12, 13, and 15-17 In disputing the Examiner's rejection of independent claim 1, Appellants argue that the present invention uses a "contact mode" of operation of an SPM, which, according to paragraphs 8-9 of the Specification, requires dragging the probe tip across the surface of a sample during scanning. Br. 10-11. Appellants contend paragraph 80 of Su '388, cited by the Examiner, discloses a contact mode cantilever but does not disclose a contact mode of method of operation. Id. at 11. Rather, Appellants contend, Su '388 states there are disadvantages to contact mode and, as such, Su employs a "tapping mode" of operation in which the probe tip interacts with sample by tapping or oscillating. Id. at 10-11 (citing, e.g., Su '388 ,-i,-i 8, 27, 62). Appellants also dispute the Examiner's finding that 3 Appeal2014-001647 Application 12/940,079 the present invention is a hybrid between contact mode and tapping mode, because claim 1 explicitly claims contact mode. Id. at 12. To Appellants' point that the present invention is not a hybrid between contact mode and tapping mode, the Examiner responds that the first limitation of claim 1 indicates the spring is excited by deflecting the sensor by said material surface, which is a hallmark of contact mode as defined in the Specification. Ans. 12; see also Spec. iJ 9 ("A constant flexure, or bend in the cantilever is maintained, which corresponds to a displacement of the probe tip."). The Examiner finds that the second, final limitation of claim 1 indicates the cantilever is oscillated near the resonance frequency to modulate the interaction between the sensor and said material surface-a hallmark of tapping mode as defined in the Specification. Ans. 11-12; see also Spec. 11 ("[T]he cantilever can be oscillated near its first (or fundamental) bending mode resonance frequency ... as the probe is raster scanned above the surface in either non-contact or tapping mode."). Therefore, according to the Examiner, the method claim 1 relies upon both contact and tapping modes of operation as further clarified by paragraph 27 of the Specification, which states the object of the present invention is to combine the "capability of contact mode imaging with the advantages of wear reduction, using an actuated tip (as in dynamic modes of operation)." Ans. 12 (citing Spec. iii! 27, 33, 56). As an initial matter, we agree with the Examiner's interpretation of independent claim 1 as including limitations of contact mode and tapping mode, based on the description in the background of the Specification. More specifically, paragraph 27 of Appellants' Specification states the object of the present invention is to combine features of contact mode with 4 Appeal2014-001647 Application 12/940,079 that of "dynamic modes" of operation, which paragraph 15 defines as "tapping or non-contact modes." This "hybrid" behavior is further exemplified by cited paragraph 56, which states that "the tip is levitated above the surface by short contact force pulses at closest approach of the oscillation cycle" (emphasis added). See also Spec. ii 33 ("[T]he tip-sample distance, d, is modulated by the oscillator amplitude, a, at the resonance frequency, COk."). Consequently, to the extent Appellants contend claim 1 "explicitly claims contact mode" (Br. 12) to require constant contact or as precluding characteristics of tapping mode (i.e., oscillating or vibrating), we determine this interpretation is not supported by the claims or the preferred embodiment, which specifically contemplates combining features of contact mode and tapping mode. See On-Line Techs., Inc. v. Bodenseewerk Perkin- Elmer GmbH, 386 F.3d 1133, 1138 (Fed. Cir. 2004) (noting that a claim construction that excludes a preferred embodiment is "a result that is rarely, if ever, correct."). Consistent with this interpretation, we agree with the Examiner's finding that Su '388 discloses "operating said SPM in contact mode, whereby said sensor is scanned on said material surface and said first spring behavior is excited by a deflection of said sensor by said material surface," as claim 1 recites. Ans. 12-13. Indeed, similar to claim 1, Su '388 describes a two spring embodiment, which includes control feedback based on "Contact Mode operation using the displacement of the weaker spring, k2 or ksoft . . . . In this manner, the feedback takes advantage of Contact Mode dynamics." Su '388 ii 27 (emphasis added); see also id. ii 63 (describing feedback control "based on the deflection of L2"). Aside from arguing that this method of operation is not "Contact Mode" based on the background 5 Appeal2014-001647 Application 12/940,079 description of the prior art, Appellants fail to explain why this description does not disclose the disputed limitation of claim 1. Accordingly, we are persuaded Su '388 discloses the limitations of independent claim 1, and we therefore sustain the Examiner's 35 U.S.C. § 102(b) rejection of claim 1, as well as claims 2--4, 12, 13, and 15-17, which are not separately argued. See 37 C.F.R. § 41.37(c)(l)(iv). Regarding the 35 U.S.C. § 103(a) rejection of claims 5 and 6 over Su '388 and Su '099, and of claims 7 and 18 over Su '3 8 8 and Duerig, Appellants present no separate patentability arguments aside from its argument that the additional references do not disclose the contact mode limitation of claim 1 (see Br. 17-23), which is not persuasive given our determination above with respect to Su '388. Accordingly, we sustain the rejections of claims 5-7 and 18 for the foregoing reasons. Claims 8-11 and 14 Claim 8 requires selecting cantilever end section and tip height resulting in a Q-factor between 5 and 10. Br. 26 (claim 8). The Examiner finds that a person of ordinary skill in the art at the time of the invention would have chosen such a Q-factor range "to provide increased accuracy of measurements made with the sensor by ensuring that the sensor has a proper quality factor for the type of sample and location on the sample." Ans. 6 (citing In re Aller, 220 F.2d 454, 456 (CCPA 1955)). In disputing this rejection, Appellants argue that the Examiner misapplies Aller, since "the claimed ranges are not simply result-effective variables or an optimization of ranges at least because the Examiner has not 6 Appeal2014-001647 Application 12/940,079 shown that the cited reference employs a contact mode with the claimed ranges to reduce wear of an item or improve a scanning speed." Br. 15-16. We are not persuaded by this argument. We agree the Examiner "has not shown that the cited reference employs a contact mode with the claimed ranges" (i.e., Q-factor between 5 and 10), but this is beside the point because if "the general conditions of a claim are disclosed in the prior art, it is not inventive to discover the optimum or workable ranges by routine experimentation." Aller, 220 F.2d at 456. Here, the Examiner finds the optimum or workable Q-factor range to provide increased accuracy involves only routine skill in the art. Ans. 7. Appellants have not directed us to evidence that, based on the claimed range, there is anything new or unexpected which is different in kind and not merely in degree from the results of the prior art. See Aller, 220 F.2d at 456. Accordingly, we sustain the Examiner's obviousness rejection of claim 8. As Appellants present no separate patentability arguments regarding claims 9 and 10, which depend from claim 8, or claims 11 and 14, also rejected over Su '388, we sustain the rejection of these claims as well. See 37 C.F.R. § 41.37(c)(l)(iv). DECISION We affirm the Examiner's final rejection of claims 1-18. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § l .136(a)(l )(iv). AFFIRMED 7 Copy with citationCopy as parenthetical citation