Corning IncorporatedDownload PDFPatent Trials and Appeals BoardJan 22, 20212020000745 (P.T.A.B. Jan. 22, 2021) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 14/530,457 10/31/2014 Robert George Manley SP13-383 2759 22928 7590 01/22/2021 CORNING INCORPORATED SP-TI-3-1 CORNING, NY 14831 EXAMINER SAMUELS, LAWRENCE H ART UNIT PAPER NUMBER 3761 NOTIFICATION DATE DELIVERY MODE 01/22/2021 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): usdocket@corning.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE ____________________ BEFORE THE PATENT TRIAL AND APPEAL BOARD ____________________ Ex parte ROBERT GEORGE MANLEY, SASHA MARJANOVIC, GARRETT ANDREW PIECH, SERGIO TSUDA, and ROBERT STEPHEN WAGNER ____________ Appeal 2020-000745 Application 14/530,457 Technology Center 3700 ____________ Before STEFAN STAICOVICI, LISA M. GUIJT, and LEE L. STEPINA, Administrative Patent Judges. GUIJT, Administrative Patent Judge. DECISION ON APPEAL STATEMENT OF THE CASE Appellant1 seeks our review under 35 U.S.C. § 134(a) of the rejection of claims 1–24 and 58–61.2 We have jurisdiction under 35 U.S.C. § 6(b). We AFFIRM-IN-PART. 1 We use the word “Appellant” to refer to “applicant” as defined in 37 C.F.R. § 1.42. Appellant identifies Corning Incorporated as the real party in interest. Appeal Br. 3. 2 Claims 25–57 have been withdrawn. Final Act. 1; Appeal Br. 5. Appeal 2020-000745 Application 14/530,457 2 THE INVENTION Appellant’s invention relates to “Stacked Transparent Material Cutting with Ultrafast Laser Beam Optics, Disruptive Layers and Other Layers.” Spec., Title. The sole independent claim on appeal, claim 1, reproduced below, is illustrative of the subject matter on appeal. 1. A method of laser processing comprising: forming a laser beam focal line in a workpiece, the laser beam focal line being formed from a pulsed laser beam, the workpiece comprising: a first layer, a second layer, and a beam disruption element located between the first and second layers; and the laser beam line generating an induced absorption within the first layer, the induced absorption producing a defect line along the laser beam focal line within the first layer. THE REJECTIONS The Examiner relies upon the following as evidence in support of the rejections: NAME REFERENCE DATE Morrison US 6,259,151 B1 July 10, 2001 Arai US 2010/0025387 A1 Feb. 4, 2010 Hosseini US 2013/0126573 A1 May 23, 2013 Abramov US 2013/0323469 A1 Dec. 5, 2013 The following rejections are before us for review: I. Claims 1, 6–24, and 58 stand rejected under 35 U.S.C. § 103 as being unpatentable over Hosseini and Morrison. Appeal 2020-000745 Application 14/530,457 3 II. Claims 2, 4, 5, and 59–61 stand rejected under 35 U.S.C. § 103 as being unpatentable over Hosseini, Morrison, and Arai. III. Claim 3 stands rejected under 35 U.S.C. § 103 as being unpatentable over Hossieni, Morrison, Arai, and Abramov. OPINION Rejection I Independent claim 1 and dependent claims 6–24 Regarding independent claim 1, the Examiner finds that Hosseini discloses forming a laser beam focal line in a workpiece from a pulsed laser beam (i.e., beam 10, lens 12), the laser beam focal line generating an induced absorption within a first layer that produces a defect line (i.e., laser filamentation track 40) along the laser beam focal line within the first layer, as required by claim 1. Final Act. 3 (citing Hosseini ¶ 5, 10, 50); see also Hosseini ¶¶ 30, 62, 63. The Examiner also finds that although Hosseini discloses a workpiece comprising first and second layers, Hosseini is silent regarding a beam disruption element located between the first and second layers, as required by claim 1. Final Act. 3. The Examiner relies on Morrison for teaching a beam disruption layer separating, or between, first and second layers, as claimed, and reasons that it would have been obvious to a skilled artisan to provide a disruption layer, as taught in Morrison, between the first and second layers of Hosseini, “to separate and protect the layers below from damage, while allowing the defect to propagate and affect the above layer.” Id. at 4 (citing Morrison, col. 2, ll. 6–23). Appeal 2020-000745 Application 14/530,457 4 Appellant argues that “[t]he characteristic feature of the weakly focused pulsed laser technique of Hosseini is formation of laser filaments,” which “are distinct from the laser beam focal line” recited in claim 1. Appeal Br. 15 (citing Hosseini ¶ 43, Fig. 1(b) (laser filament 18, filament track 20)); Reply Br. 2 (“the prior art cited by the Examiner fails to disclose the ‘laser beam focal line’ feature of claim 1”). As an initial matter, and for clarity, Appellant’s argument appears to misapply the Examiner’s findings supra, in that the Examiner equates Hosseini’s weakly focused pulsed laser technique as forming a laser beam focal line, as claimed, wherein the laser beam focal line formed by Hosseini’s technique generates an induced absorption to produce filaments, or defect lines, along the laser beam focal line, within a workpiece layer, as claimed. In other words, the Examiner does not find that Hosseini’s filament is a laser beam focal line. Notwithstanding, Appellant submits that [i]n [Hosseini’s] filamentation process the weakly focused pulsed laser beam is controlled to have intensity sufficient to induce the non-linear Kerr effect and insufficient to induce optical breakdown. . . . The Kerr effect leads to an increase in refractive index of the substrate in the vicinity of the weakly focused laser beam. The localized increase in refractive index leads to localized self focusing of the weakly focused laser beam within the substrate (to a diffraction-limited beam diameter). . . . The self focusing leads to a localized increase the intensity of the weakly focused laser beam that is sufficient to create a low- density plasma in the localized region of self focusing. . . . Formation of the low-density plasma leads to a decrease in refractive index in the localized region of self focusing, a defocusing of the laser beam, and collapse of the filament (18). . . . As the laser beam defocuses, its intensity decreases, the low-density plasma relaxes, self-focusing through the Kerr effect resumes, and a new filament (18) forms in the direction of beam propagation. A series of multiple focusing and defocusing events Appeal 2020-000745 Application 14/530,457 5 occur to form a filament track (20) in the direction of beam propagation (the thickness dimension of the substrate in Fig. 1 of Hosseini). Each filament track (20) includes a series of filaments (18) that alternate with non-filament zones. Appeal Br. 16 (citing Hosseini ¶¶ 43–45, 48, 53, 76, Fig. 1) (emphasis added); see also id. at 17. In contrast, Appellant submits that, with respect to the method of claim 1, [i]nstead of forming filament tracks with alternating filaments and non-filament zones through repeated focusing (Kerr effect) and defocusing (induced by a low-density plasma) effects that dynamically perpetuate in the direction of beam propagation, [the claimed] laser beam focal line produces a simultaneous series of continuous or closely spaced focal points in the direction of beam propagation. Appeal Br. 16 (emphasis added). Appellant refers to the Specification’s disclosure that a laser beam focal line may be formed: (a) by aligning layer 1 substantially perpendicularly to the longitudinal beam axis, “and thus behind the same focal line 2b produced by the optical assembly” such that “suitable laser intensity along the laser beam focal line 2b . . . is ensured by adequate focusing of laser beam 2 on a section of length l,” for example, using “Bessel beams, Airy beams, Weber beams and Mathieu beams (i.e., non-diffractive beams), whose field profiles are typically given by special functions that decay more slowly in the transverse direction (i.e. direction of propagation) than the Gaussian function” (Spec. ¶ 72); (b) using “aspheres or multi-lens systems deviating from ideally corrected systems, which do not form an ideal focal point but a distinct, elongated focal line of a defined length” (id. ¶ 79); and (c) using “[a] combination of axicon 10 and focusing lens 11,” wherein Appeal 2020-000745 Application 14/530,457 6 due to the axicon 10, a usually round laser spot is sent to the focusing lens 11 in the form of a ring, and the asphericity of axicon 10 has the effect that a focal line is formed beyond the focal plane of the lens instead of a focal point in the focal plane (id. ¶ 88). Appellant submits that “a focal line corresponds to a region of simultaneous focusing that extends beyond a focal point to an elongated linear volume,” and concludes that Hosseini fails to disclose a laser beam focal line, as claimed, because “the optical system of Hosseini merely includes a standard lens (objective lens 12 of Fig. 1) that is designed to focus the laser beam to a focal point.” Appeal Br. 17. Appellant maintains that “[t]he energy needed to produce the filament tracks in the method of Hosseini emanates from a focal point and evolves over time to form multiple damage regions, where the degree (tightness) of focus is controlled to maintain the weak focus that prevents optical breakdown,” whereas, in the claimed method, “the focal line provides energy simultaneously over a linear illumination area.” Id. (emphasis added). Appellant concludes that “[w]hereas the method of Hosseini relies on a dynamic mechanism involving alternating self focusing (Kerr effect) and defocusing (induced by a low-density plasma) events (self focus – defocus – self focus – defocus . . . ), [the claimed] method relies on a static mechanism involving a continuous and uniformly illuminated linear focal region.” Id. at 18. We construe the claim term “laser beam focal line” to mean a long and narrow, or elongated, uninterrupted region of focused laser energy, for example, in contrast to a single, discrete focal point of laser energy. See Spec. ¶ 70 (“[l]aser beam focal line 2b is a region of high energy density”; “optical assembly 6 turns the incident laser beam into a laser beam focal line Appeal 2020-000745 Application 14/530,457 7 2b on the output side over a defined expansion range along the beam direction (length l of the focal line)”). We also accept Appellant’s submission supra that the claimed laser beam focal line may be produced by a simultaneous series of continuous or closely spaced focal points in the direction of beam propagation, provided such closely spaced focal points result in a long and narrow, uninterrupted region of focused laser energy. We decline to read into the definition of the claimed laser beam focal line the requirement of a uniform illumination (or energy density) along the laser beam focal line, to the extent argued by Appellant supra, as the Specification states such uniformity as a goal, but suggests that some variation is possible. See, e.g., Spec. ¶ 77 (“The spot size should not vary too strongly for the purpose of a uniform interaction along the focal line.”). We further determine that the laser beam focal line must exist in at least a moment of time, however, we are not persuaded by Appellant’s argument that the definition of the claim term “laser beam focal line” restricts the method of forming the laser beam focal line, for example, to the use of only lenses or optics (as opposed to a lens and a nonlinear optical Kerr effect), or to be caused by a single event. In other words, although claim 1 separately recites a further limitation restricting the method of forming the laser beam focal line, namely, being “formed from a pulsed laser beam,” claim 1 does not exclude additional methods from being combined with a pulsed laser beam to form the laser beam focal line or to restrict the timing of the application of such methods. We agree with the Examiner’s finding that the laser beam focal line recited in claim 1 reads on Hosseini’s long and narrow channel of focused and/or self-focused, uninterrupted laser energy: “by weak focusing, high Appeal 2020-000745 Application 14/530,457 8 intensity short duration laser light, . . . [a] high spatio-temporal localization of the light field can deposit laser energy in a long narrow channel, while also being associated with other complex nonlinear propagation effects.” Hosseini ¶ 43. In further support, we refer to Hosseini’s disclosure that “the spatial intensity profile of the laser pulse acts like a focusing lens due to the nonlinear optical Kerr effect,” which “causes the beam to self-focus, resulting in an increase of the peak intensity.” Hosseini ¶ 44 (emphasis added); see also id. ¶ 48 (“[i]n weak focusing, . . . the nonlinear Kerr effect is believed to create an extended laser interaction focal volume that greatly exceeds the conventional depth of focus, overcoming the optical diffraction that normally diverges the beam from the small self-focused beam waist” (emphasis added)). We are not persuaded by Appellant’s argument that such self-focusing (after focusing via a standard lens) disqualifies Hosseini’s laser beam from being a focused laser beam, and further, from forming a laser beam focal line as a long and narrow channel of focused laser energy, as required by claim 1. We are also not persuaded by Appellant’s argument that because multiple, discrete filament segments may be created before or after formation of a segment of Hosseini’s filament (i.e., “the plasma temporarily lowers the refractive index in the centre of the beam path causing the beam to defocus and break up the filament” id. at ¶ 45), the laser beam focal line as recited in claim 1 fails to read on Hosseini’s long narrow channel of self- focused laser energy forming a non-interrupted segment of a filament.3 In 3 Cf. Spec. ¶ 52 (“In some embodiments, the perforation may not be a continuously open channel and may include sections of solid material dislodged from the substrate material by the laser,” wherein “[o]ne or more Appeal 2020-000745 Application 14/530,457 9 other words, Hosseini’s long narrow channel of self-focused laser energy forming an uninterrupted segment of a filament is continuous. Appellant does not inform us of other limitations set forth in claim 1 that distinguishes Hosseini’s filamentation method from the methods set forth in the Specification for forming a laser beam focal line. Accordingly, we sustain the Examiner’s rejection of independent claim 1, and claims 6–24 depending therefrom. Dependent claim 58 Claim 58 depends from independent claim 1 and requires, in relevant part, “wherein the pulsed laser beam is a non-diffractive beam.” Appeal Br., Claims App. The Examiner finds that although Hosseini does not disclose that the pulsed laser beam is a non-diffractive beam, as claimed, Hosseini “indicates that . . . diffractive beams could result as is well known in the art, thus a non-diffractive beam is the default, or at least it is known to be used.” Final Act. 8 (citing Hosseini ¶ 62). In the Examiner’s Answer, the Examiner further relies on Hosseini’s teaching that “‘[i]n weak focusing, which is preferential, the nonlinear Kerr effect is believed to create an extended laser interaction focal volume overcoming the optical diffraction that normally diverges the beam from the small self-focused beam waist’, thus a non- diffractive beam results.” Ans. 14. Appellant argues that Hosseini’s method, as discussed supra, relies on diffraction, in combination with the nonlinear optical Kerr effect. Appeal Br. 18. Appellant also submits that “the optical system used by Hosseini is open channels (unblocked regions may be dispersed between sections of dislodged material.”). Appeal 2020-000745 Application 14/530,457 10 incapable of delivering a non-diffractive beam,” because “the conventional objective lens used by Hosseini produces a diffractive beam,” which is required by Hosseini’s filamentation process, “to limit the degree of self- focusing to prevent optical breakdown.” Id. Appellant further submits that Hosseini’s diffractive optics, which are relied on by the Examiner supra with reference to Paragraph 62 of Hosseini, “refers to an embodiment in which a laser beam is split into multiple beams and directed to a substrate to induce Kerr-effect filamentation at multiple positions simultaneously,” but does not “convert laser beams from non-diffractive to diffractive as suggested by the Examiner.” Id. We agree with Appellant that the Examiner has not established by a preponderance of the evidence that Hosseini discloses the use of a non- diffractive (pulsed) laser beam to form a laser beam focal line, as claimed. Hosseini’s general reference to optical diffraction and diffractive optics for addressing laser beam diffraction, as relied on by the Examiner supra, is insufficient to support a finding that Hosseini’s pulsed laser beam is a non- diffractive beam. See, e.g., Spec. ¶ 72 (discussing specific examples of non- diffractive beams, including “Bessel beams, Airy beams, Weber beams and Mathieu beams”). Accordingly, we do not sustain the Examiner’s rejection of dependent claim 58. Rejections II and III Appellant chose not to present arguments for the patentability of claims 2–5 and 59–62 apart from the arguments presented for independent claim 1 supra, from which claims 2–5 and 59–62 depend. Appeal Br. 19– Appeal 2020-000745 Application 14/530,457 11 22. Accordingly, we sustain the Examiner’s rejection of claims 2–5 and 59– 62 for essentially the same reasons as stated supra. CONCLUSION In summary: Claims Rejected 35 U.S.C. § Reference(s) Affirmed Reversed 1, 6–24, 58 103 Hosseini, Morrison 1, 6–24 58 2, 4, 5, 59–61 103 Hosseini, Morrison, Arai 2, 4, 5, 59–61 3 103 Hossieni, Morrison, Arai, Abramov 3 Overall Outcome 1–24, 59–61 58 No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(1)(iv). AFFIRMED-IN-PART Copy with citationCopy as parenthetical citation