Ex Parte Hirler et alDownload PDFPatent Trial and Appeal BoardJul 24, 201813197903 (P.T.A.B. Jul. 24, 2018) Copy Citation UNITED STA TES p A TENT AND TRADEMARK OFFICE APPLICATION NO. FILING DATE FIRST NAMED INVENTOR 13/197,903 08/04/2011 Franz Hider 57579 7590 07/26/2018 MURPHY, BILAK & HOMILLER/INFINEON TECHNOLOGIES 1255 Crescent Green Suite 200 CARY, NC 27518 UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www .uspto.gov ATTORNEY DOCKET NO. CONFIRMATION NO. 1012-0219 / 2010P50477 6736 us EXAMINER WEBB, VERNONP ART UNIT PAPER NUMBER 2811 NOTIFICATION DATE DELIVERY MODE 07/26/2018 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): official@mbhiplaw.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte FRANZ HIRLER, ANTON MADDER, THOMAS RAKER, HANS-JOACHIM SCHULZE, and WOLFGANG WERNER Appeal2017-008147 Application 13/197 ,903 Technology Center 2800 Before TERRY J. OWENS, DEBRA L. DENNETT, and MICHAEL G. McMANUS, Administrative Patent Judges. OWENS, Administrative Patent Judge. DECISION ON APPEAL STATEMENT OF THE CASE The Appellants appeal under 35 U.S.C. § 134(a) from the Examiner's rejection of claims 1-10 and 12-21. We have jurisdiction under 35 U.S.C. § 6(b). The Invention The Appellants claim a transistor component. Claims 1 and 10 are illustrative: 1. A transistor component, comprising: in a semiconductor body a source zone and a drift zone of a first conduction type; Appeal2017-008147 Application 13/197 ,903 a body zone of a second conduction type complementary to the first conduction type, the body zone being arranged between the drift zone and the source zone; a source electrode in contact with the source zone and the body zone; a gate electrode adjacent the body zone and dielectrically insulated from the body zone by a gate dielectric layer; a diode structure connected between the drift zone and the source electrode and which comprises: a first emitter zone adjoining the drift zone in the semiconductor body; and a second emitter zone of the first conduction type adjoining the first emitter zone, the second emitter zone being connected to the source electrode and having an emitter efficiency y of less than 0.7. 10. A transistor component, comprising: in a semiconductor body a source zone and a drift zone of a first conduction type; a body zone of a second conduction type complementary to the first conduction type, the body zone being arranged between the drift zone and the source zone; a source electrode in contact with the source zone and the body zone; a gate electrode adjacent the body zone and dielectrically insulated from the body zone by a gate dielectric layer; and a Schottky diode structure connected between the drift zone and the source electrode, the Schottky diode structure comprising a first emitter zone of the second conduction type adjoining the drift zone and extending to a surface of the semiconductor body at which the source electrode is disposed. Derraa Ruething Zundel The References US 7,091,513 Bl US 2007/0120181 Al US 2009/0039419 Al 2 Aug. 15, 2006 May 31, 2007 Feb. 12,2009 Appeal2017-008147 Application 13/197 ,903 The Rejections The claims stand rejected under 35 U.S.C. § 103 as follows: claims 1, 2, 7-10 and 12-21 over Zundel in view ofRuething 1 and claims 3---6 over Zundel in view of Ruething and Derraa. OPINION We reverse the rejections. We need address only the independent claims (1 and 10). Claim 1 Claim 1 requires a semiconductor body comprising a diode structure which is connected between a drift zone and a source electrode and has 1) a first emitter zone adjoining the drift zone, and 2) a second emitter zone which adjoins the first emitter zone, is connected to the source electrode, and has an emitter efficiency less than O. 7. Zundel discloses a semiconductor body (100) comprising a structure ( which the Examiner relies upon as corresponding to the Appellants' diode structure (Final Act. 4)) having 1) a portion between a drift zone (12)'s safety zone (121) and a source electrode (15), 2) a drift zone (12)'s mesa region (122) (which the Examiner relies upon as corresponding to the Appellants' first emitter zone (Final Act. 4)) adjoining the safety zone (121 ), and 3) a drain zone (11)/semiconductor layer (16) (which the Examiner relies upon as corresponding to the Appellants' second emitter zone (Final Act. 4)) (,r,r 20, 44; Figs. 1, 3). 1 The Examiner's statement of the rejection excludes rejected claim 21 and includes canceled claim 11 (Final Act. 3, 9). 3 Appeal2017-008147 Application 13/197 ,903 Ruething discloses a semiconductor body (100) wherein, to reduce latch-up,2 an emitter zone (11) has a lower emitter efficiency in a region corresponding to a second cell array section (102) than in a region corresponding to a first cell array section (i1i1 3, 10, 25; Fig. 1 ). The second cell array section (102)'s "zone having a reduced emitter efficiency preferably reaches, in the lateral direction, into the first cell array section. The extent of this zone having a reduced emitter efficiency into the first cell array section is preferably 0.1 to 2 diffusion lengths of free charge carriers" (i129). The Examiner finds that Zundel' s safety zone ( 121) is a drift zone (Final Act. 4 ). Zundel' s drift zone is item 12 and comprises a safety zone (121) and a mesa zone (122) (i-f 32; Fig. 1). Thus, the Examiner's finding that Zundel discloses "a first emitter zone (item 122) adjoining the drift zone (item 121 )" (Final Act. 4) is not supported by Zundel. The Examiner finds that "the term 'adjoin' may include indirect or directly 'touching at some point or along a line"' (Ans. 4) and that Zundel discloses "a second emitter zone (item 11/16) of the first conduction type adjoining the first emitter zone (item 122)" (Final Act. 4). "'[D]uring examination proceedings, claims are given their broadest reasonable interpretation consistent with the specification."' In re Translogic Tech. Inc., 504 F.3d 1249, 1256 (Fed. Cir. 2007) (quoting In re Hyatt, 211 F.3d 1367, 1372 (Fed. Cir. 2000)). The ordinary meaning of 2 "Latch-up is an operation in which a parasitic npn bipolar transistor which is formed from then-doped source zone 15, the p-doped body zone 14 and then-doped drift zone 12 switches on" (i-f 6). 4 Appeal2017-008147 Application 13/197 ,903 "adjoining" is "touching or bounding at a point or line."3 According to that meaning, Zundel's drain zone (11) adjoins the drift zone (12) but does not adjoin the drift zone (12)'s mesa zone (122) which is separated from the drain zone (11) by the drift zone (12)'s safety zone (121) (Fig. 1). Zundel's semiconductor layer (16) does not adjoin the drift zone (12)'s mesa zone (122) but, rather, is separated therefrom by the drain zone (11) and the drift zone (12 )' s safety zone (121) (Fig. 3 ). The Examiner does not establish that the Appellants' Specification broadens the meaning of the term "adjoining" to include items separated from one another by something else. The Examiner finds that the Appellants' claim term "connected" includes "electrically connected" and that Zundel' s drain zone ( 11) and semiconductor layer (16) are electrically connected to the source electrode (15) (Final Act. 4; Ans. 4). The Appellants' Specification states that the diode structure's electrode ( 41) and the source electrode (21) are "contact-connected" (Spec. ,r 69). The Examiner does not address that disclosure and establish that the broadest meaning of the claim term "connected" consistent therewith includes "electrically connected." Also, when claims are interpreted, all limitations must be given effect. See In re Angstadt, 537 F.2d 498, 501 (CCPA 1976) ("we must give effect to all claim limitations"). The Examiner does not establish that the Examiner's interpretation of the Appellants' claim term "connected" as including electrical connection resulting from all components being directly or indirectly electrically 3 Merriam-Webster's Collegiate Dictionary 16 (1 ith ed. 2003). 5 Appeal2017-008147 Application 13/197 ,903 connected does not render the Appellants' claim term "connected" superfluous. The Examiner finds that "on the surface, the claim limitation of 'the second emitter zone being connected to the source electrode and having an emitter efficiency y of less than O. 7' does not specify what the emitter efficiency is in respect to" (Ans. 3). That finding, which apparently pertains to the breadth of the claim term "emitter efficiency," improperly does not address the Appellants' Specification's definition of emitter efficiency as y = 1 -}3i/(h1 + }32), where }31 is a first charge carrier current flowing from the first emitter zone (31) into the second emitter zone (32) when the forward voltage of the diode structure is reached, and }32 is a second charge carrier current flowing from the second emitter zone (32) into the first emitter zone (31) when the forward voltage of the diode structure is reached (Spec. ,r 39), and disclosure that "the properties of the first and of the second emitter zones 31, 32 are chosen such that the emitter efficiency y of the second emitter zone 32 is less than 0.7" (Spec. ,r 37). The Examiner finds that "Ruething et al. disclose an emitter zone having an emitter efficiency y of less than 0.7, more specifically 'The extent of this zone having a reduced emitter efficiency into the first cell array section is preferably 0.1 to 2 diffusion lengths of free charge carriers.' (i.e., 0.7 is in the disclosed range, pgs. 2-3, paragraph [0029])" (Ans. 2). The numerical range in that portion of Ruething is diffusion lengths of free charge carriers, not emitter efficiency. The Examiner concludes that "[a]pplying Ruething's teaching of reducing the emitter efficiency to the device disclosed by Zundel et al. such 6 Appeal2017-008147 Application 13/197 ,903 that the second emitter zone having [ sic, has] an emitter efficiency y of less than 0. 7 would have been obvious for one of ordinary skill in the art and would have resulted in successfully providing a power IGBT devices [sic] which is provides [sic] improved latch up behavior within the device" (Ans. 3). The Examiner does not compare Zundel's and Ruething's devices and establish, based on that comparison, that Ruething's disclosure regarding reducing latch up would have led one of ordinary skill in the art to apply Ruething' s disclosure regarding emitter efficiency to Zundel' s device such that a second cell array section zone has an emitter efficiency less than 0.7 as that term is defined in the Appellants' Specification. Claim 10 Claim 10 requires a semiconductor body comprising a Schottky diode structure connected between a drift zone and a source electrode and having a first emitter zone which adjoins the drift zone and extends to a surface of the semiconductor body at which the source electrode is disposed. The Examiner finds that Zundel discloses a Schottky diode structure connected between the drift zone ( 12)' s safety zone ( 121) and the source electrode (15) and "comprising a first emitter zone (item 11/16) of the second conduction type adjoining the drift zone (item 121) and extending to a surface of the semiconductor body; at which the source electrode (item 15) is disposed" (Final Act. 7). The region between Zundel's safety zone (121) and source electrode (15) does not comprise the drain zone (11) and semiconductor layer (16) and includes, but is not connected between, the drift zone (13) and the source electrode (15) (Fig. 3). 7 Appeal2017-008147 Application 13/197 ,903 Thus, the Examiner has not set forth a factual basis that is sufficient to support a conclusion of obviousness of the Appellants' claimed transistor components. See In re Warner, 379 F .2d 1011, 1017 (CCP A 1967) ("A rejection based on section 103 clearly must rest on a factual basis, and these facts must be interpreted without hindsight reconstruction of the invention from the prior art"). Accordingly, we reverse the rejections. DECISION The rejections under 35 U.S.C. § 103 of claims 1, 2, 7-10, and 12-21 over Zundel in view of Ruething and claims 3---6 over Zundel in view of Ruething and Derraa are reversed. The Examiner's decision is reversed. REVERSED 8 Copy with citationCopy as parenthetical citation